Touchscreen panel sensor film and manufacturing method thereof

ABSTRACT

A touchscreen panel sensor film, with alignment marks or product information assigned thereto is formed so as to improve post-processing accuracy. The touchscreen panel sensor film includes a transparent base film and a transparent electrical conductor pattern provided on at least one surface of the base film, and achieves the improvement of post-processing accuracy by having alignment marks or product information in a non-active area on the sensor film.

CROSS REFERENCES TO RELATED APPLICATIONS

This application claims the priority of Japanese patent application JP2010-219774, filed on Sep. 29, 2010, and Japanese patent application JP2011-141603, filed on Jun. 27, 2011, the entire disclosure of theseearlier applications being herein incorporated by reference. The entiredisclosure of Japanese patent application JP 2009-86477, filed on Mar.31, 2009, and Japanese patent application JP 2009-273798, filed on Dec.1, 2009, is also incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to touchscreen panel sensor films andmanufacturing methods thereof.

2. Description of Related Art

Nowadays, touchscreen panel devices are widely used as input means. Thetouchscreen panel devices include a touchscreen panel sensor, a controlcircuit for detecting a contact position of an object on the touchscreenpanel sensor, electrical interconnects, and a flexible printed circuit(FPC) board. In many cases, these touchscreen panel devices are usedwith a display device such as a liquid-crystal display or a plasmadisplay, as the input means for the various types of hardware, forexample, ticket-vending machines, automatic teller machines (ATMs), cellphones, or game consoles, that each incorporate such a display device.In such hardware, the touchscreen panel sensor is disposed over adisplay screen of the display device; therefore, the touchscreen paneldevice can perform highly direct data input into the display device. Aregion of the touchscreen panel sensor that faces a display region ofthe display device is transparent, and this region of the touchscreenpanel sensor is to constitute an active area in which the sensor candetect the contact position (approach position).

The touchscreen panel devices can be divided into various typesaccording to the principles of detecting the contact position orapproach position of the object on the touchscreen panel sensor.Touchscreen panel devices of a capacitive coupling scheme are catchingattention nowadays for reasons of optical brightness, design quality,structural simplicity, functional excellence, and the like. In thetouchscreen panel devices of the capacitive coupling scheme, an externalconductor (typically, finger) whose position is to be detected generatesa new parasitic capacity by coming into contact or near-contact with thetouch sensor through a dielectric. The touchscreen panel sensor utilizesa change in that capacitance to detect the position of the object on thesensor. The capacitive coupling scheme is subdivided into a surface typeand a projected type. Of the two types, the projected type, inparticular, is receiving attention for its suitableness for multitouchrecognition (multipoint recognition) applications or requirements, asdescribed in JP 2007-533044T.

Touchscreen panel sensors of the projected capacitive-coupling schemeinclude a dielectric, a first sensor electrode, and a second sensorelectrode, the latter two sensor electrodes being formed in differentpatterns on both sides of the dielectric. Typically, the first sensorelectrode and the second sensor electrode, both including a grid-likearray of electrical conductors, detect a position of the electricalconductors based on an electromagnetic change or capacitance change thatoccurs when an external conductor (typically, a finger) comes intocontact or near-contact with the touchscreen panel sensor.

As described in JP 1992-264613A, such a touchscreen panel sensor of theprojected capacitive-coupling scheme is generally fabricated by bondingtogether via an adhesive layer, a first base film with a first sensorelectrode formed thereupon, and a second base film with a second sensorelectrode formed thereupon. In the thus-fabricated touchscreen panelsensor, the first sensor electrode and the second sensor electrode areconnected to an external control circuit via electrical lead-out lines(electrical conductors for lead-out) formed in regions external toactive areas of the respective base films. When the touchscreen paneldevice is used with a display device, the first sensor electrode and thesecond sensor electrode are formed from transparent electricallyconductive materials of low electrical conductivity. On the other hand,the lead-out lines disposed outside the active areas do not need to betransparent and are each formed on the base film by screen-printing ametallic material of high electrical conductivity.

[Patent Document 1]: JP2007-533044T

[Patent Document 2]: JP1992-264613A

SUMMARY OF THE INVENTION

To improve design quality and enlarge the display region of the displaydevice, a region surrounding a display region, called a frame region orbezel region, is nowadays required to be reduced in surface area. Alongwith this trend, it is also being requested that non-active areas otherthan the active areas of the touchscreen panel sensor be reduced insurface area. This request can be met if the lead-out lines are formedwith sufficiently high fineness in the non-active areas. The reductionin the surface area of the non-active areas and the formation of highlyfine lead-out lines, in turn, call for accurate cutting of thetouchscreen panel sensor fabricated on a web or a sheet, accuratepositioning of the touchscreen panel sensor on the touchscreen paneldevice, and accurate lamination with an FPC substrate. These accuracyrequirements, however, are difficult to satisfy with any of the variousmanufacturing methods currently in use, such as screen printingmentioned above.

The present invention has been made with such taken into account, and anobject of the invention is to provide a highly reliable touchscreenpanel sensor film including a small non-active area fabricated on a webor a sheet. The sensor film is formed to enable improvement ofprocessing accuracy for creating precut individual pieces that are toconstitute a touchscreen panel sensor, improvement of interconnectionaccuracy between high-precision electrical lines and an FPC substrate,and improvement of position-matching accuracy with respect to atouchscreen panel device. Another object of the invention is to providea touchscreen panel sensor film having product information recorded in anon-active area previously reduced in surface area, and a method formanufacturing the sensor film.

Means for Solving the Problems

A touchscreen panel sensor film according to a first aspect of thepresent invention includes a transparent base film, and a transparentelectrical conductor pattern provided on at least one surface of thebase film. Alignment marks or product information is provided in anon-active area of the sensor film.

The alignment marks or product information in the touchscreen panelsensor film according to the present invention may include either atwo-layer film or a three-layer film; the two-layer film comprising atransparent electrically conductive layer and a covering electricallyconductive layer arranged in that order on the base film, and thethree-layer film comprising a transparent electrically conductive layer,an intermediate layer, and a covering electrically conductive layerarranged in that order on the base film.

The alignment marks or product information in the touchscreen panelsensor film according to the present invention may include either atwo-layer film or a three-layer film; the two-layer film comprising atransparent electrically conductive layer and a covering electricallyconductive layer arranged in that order on the base film, and thethree-layer film comprising a transparent electrically conductive layer,an intermediate layer, and a covering electrically conductive layerarranged in that order on the base film, and may be formed on bothsurfaces of the base film.

The alignment marks or product information in the touchscreen panelsensor film according to the present invention may include either atwo-layer film or a three-layer film; the two-layer film comprising atransparent electrically conductive layer and a covering electricallyconductive layer arranged in that order on the base film, and thethree-layer film comprising a transparent electrically conductive layer,an intermediate layer, and a covering electrically conductive layerarranged in that order on the base film. Additionally, the alignmentmarks or the product information may include the intermediate layerprovided spacedly from the base film, on one portion of the transparentelectrical conductor, and a highly electrically conductive layerprovided on the intermediate layer. In this case, the highlyelectrically conductive layer will be formed from a material having anelectrical conductivity higher than that of the transparent electricalconductor and that of a material forming the intermediate layer, and theintermediate layer will be formed from a material whose adhesion to thetransparent electrical conductor is higher than that of the highlyelectrically conductive layer. The highly electrically conductive layermay be formed from a silver alloy, and the intermediate layer may beformed from a MoNb alloy.

In the touchscreen panel sensor film according to the present invention,unit patterns each constituting individual products as a unit may beformed by step-and-repeat imposition.

The alignment marks or product information in the touchscreen panelsensor film according to the present invention may be formed for each ofthe unit patterns.

The alignment marks or product information in the touchscreen panelsensor film according to the present invention may be formed for each ofa predetermined number of sets of unit patterns formed bystep-and-repeat imposition.

Purposes of use of the alignment marks in the touchscreen panel sensorfilm according to the present invention may be sheet cutting,individual-piece cutting, individual-piece punching-through, FPCattaching, or position matching to a display panel.

The alignment marks in the touchscreen panel sensor film according tothe present invention may be formed for each of the purposes.Alternatively, at least one of the alignment marks may be formed so asto fulfill at least two of the purposes. Further alternatively, thealignment marks may include an alignment mark formed so as to fulfillonly one of the purposes, and an alignment mark formed so as to fulfillat least two of the purposes.

The product information in the touchscreen panel sensor film accordingto the present invention may includes at least one kind of informationamong product name information, lot number information, manufacturingdate information, and product grade information. The product informationmay be formed in a bar code format.

A second aspect of the present invention is a manufacturing method forthe touchscreen panel sensor film including

a transparent base film,

a transparent electrical conductor pattern provided on at least onesurface of the base film, with a portion of the conductor pattern beinglinearly formed on the surface of the base film, and

alignment marks or/and product information formed in a non-active area.

The manufacturing method according to the second aspect of the presentinvention includes the steps of:

forming a photosensitive layer having a photosensitive property, on asurface of a laminate including the base film, a transparentelectrically conductive layer provided on at least one surface of thebase film, and a covering electrically conductive layer provided on thetransparent electrically conductive layer, the photosensitive layerbeing formed upon the covering electrically conductive layer;

exposing the photosensitive layer to light;

developing the photosensitive layer, thereby transferring thephotosensitive layer to patterns corresponding to the alignment marksor/and the product information, as well as to a sensor portion, terminalportion, and electrical lead-out lines, each of the three portions beinglater formed;

patterning the covering electrically conductive layer by etching thecovering electrically conductive layer, using the patternedphotosensitive layer as a mask;

patterning the transparent electrically conductive layer by etching thetransparent electrically conductive layer using the patternedphotosensitive layer and the patterned covering electrically conductivelayer as masks;

removing the patterned photosensitive layer;

forming another photosensitive layer on the patterned coveringelectrically conductive layer;

exposing the other photosensitive layer to light;

patterning the other photosensitive layer by means of development;

removing a portion of the patterned covering electrically conductivelayer by etching the patterned covering electrically conductive layer,using the patterned other photosensitive layer as a mask, therebyforming the sensor portion; and

removing the patterned other photosensitive layer, thereby obtaining thetouchscreen panel sensor film including the alignment marks or/andproduct information.

A third aspect of the present invention is a manufacturing method forthe touchscreen panel sensor film including

a transparent base film,

a transparent electrical conductor pattern provided on at least onesurface of the base film, with a portion of the conductor pattern beinglinearly formed on the surface of the base film, and

alignment marks or/and product information formed in a non-active area.

The manufacturing method according to the third aspect of the presentinvention includes the steps of:

forming a photosensitive layer having a photosensitive property, on asurface of a laminate including the base film, a transparentelectrically conductive layer provided on at least one surface of thebase film, an intermediate layer provided on the transparentelectrically conductive layer, and a covering electrically conductivelayer provided on the intermediate layer, the covering electricallyconductive layer facing the laminate surface having the photosensitivelayer formed thereupon;

exposing the photosensitive layer to light;

developing the photosensitive layer, thereby transferring thephotosensitive layer to patterns corresponding to the alignment marksor/and the product information, as well as to a sensor portion, terminalportion, and electrical lead-out lines, each of the three portions beinglater formed;

patterning the covering electrically conductive layer and theintermediate layer by etching the covering electrically conductive layerand the intermediate layer, using the patterned photosensitive layer asa mask;

patterning the transparent electrically conductive layer by etching thetransparent electrically conductive layer using the patternedphotosensitive layer and the patterned covering electrically conductivelayer and intermediate layer as masks;

removing the patterned photosensitive layer;

forming another photosensitive layer on the patterned coveringelectrically conductive layer;

exposing the other photosensitive layer to light;

patterning the other photosensitive layer by means of development;

removing a portion of the patterned covering electrically conductivelayer and intermediate layer each by etching the patterned coveringelectrically conductive layer and the intermediate layer, using thepatterned other photosensitive layer as masks, thereby forming thesensor portion; and

removing the patterned other photosensitive layer, thereby obtaining thetouchscreen panel sensor film including the alignment marks or/andproduct information.

A fourth aspect of the present invention is a manufacturing method forthe touchscreen panel sensor film. The manufacturing method according tothe fourth aspect of the present invention includes the steps of:forming a photosensitive layer having a photosensitive property, on asurface of a laminate including a transparent base film, a transparentelectrically conductive layer provided on one surface of the base film,and a covering electrically conductive layer provided on the transparentelectrically conductive layer, the photosensitive layer being formedupon the covering electrically conductive layer; exposing thephotosensitive layer to light; developing the photosensitive layer,thereby patterning the photosensitive layer; patterning the coveringelectrically conductive layer by etching the covering electricallyconductive layer, using the patterned photosensitive layer as a mask;patterning the transparent electrically conductive layer by etching thetransparent electrically conductive layer, using the patternedphotosensitive layer and the patterned covering electrically conductivelayer as masks; removing the patterned photosensitive layer; forminganother photosensitive layer on the patterned covering electricallyconductive layer; exposing the other photosensitive layer to light;patterning the other photosensitive layer by means of development;removing a portion of the patterned covering electrically conductivelayer by etching the patterned covering electrically conductive layer,using the patterned other photosensitive layer as a mask; and removingthe patterned other photosensitive layer. Alignment marks or productinformation is created simultaneously with the touchscreen panel sensorpatterns in the steps.

In a method for manufacturing a touchscreen panel sensor film accordingto the present invention, the covering electrically conductive layer maybe formed from a material having conductivity higher than that of amaterial forming the transparent electrically conductive layer.

A method for manufacturing a touchscreen panel sensor film according tothe present invention may further includes the step of acceleratingcrystallization of the transparent electrically conductive layer of anamorphous form by conducting an annealing process. The step ofaccelerating crystallization of the transparent electrically conductivelayer may be conducted later than the step of patterning the transparentelectrically conductive layer, while simultaneously being earlier thanthe step of removing a portion of the patterned covering electricallyconductive layer. The covering electrically conductive layer in thetouchscreen panel sensor film manufacturing method according to thepresent invention may contain silver as a major constituent.

In a method for manufacturing a touchscreen panel sensor film accordingto the present invention, the covering electrically conductive layer mayinclude an intermediate layer provided on the transparent electricallyconductive layer, and a highly electrically conductive layer provided onthe intermediate layer. In this case, the highly electrically conductivelayer is formed from a material having conductivity higher than that ofa material forming the transparent electrically conductive layer and theintermediate layer, and the intermediate layer is formed from a materialwhose adhesive strength with respect to the transparent electricallyconductive layer is greater than that of the highly electricallyconductive layer.

In a method for manufacturing a touchscreen panel sensor film accordingto the present invention, the highly electrically conductive layer maybe formed from a silver alloy and the intermediate layer may be formedfrom a MoNb alloy.

According to a fifth aspect of the present invention, a laminate is usedto fabricate a touchscreen panel sensor film. The laminate according tothe present invention includes a transparent base film, a transparentelectrically conductive layer provided on one surface of the base film,and a covering electrically conductive layer provided on the transparentelectrically conductive layer.

The covering electrically conductive layer in the laminate according tothe present invention may be formed from a material having conductivityhigher than that of a material forming the transparent electricallyconductive layer.

The covering electrically conductive layer in the laminate according tothe present invention may include an intermediate layer provided on thetransparent electrically conductive layer, and a highly electricallyconductive layer provided on the intermediate layer. In this case, thehighly electrically conductive layer is formed from a material havingconductivity higher than that of a material forming the transparentelectrically conductive layer and the intermediate layer, and theintermediate layer is formed from a material whose adhesive strengthwith respect to the transparent electrically conductive layer is greaterthan that of the highly electrically conductive layer.

The covering electrically conductive layer in the laminate according tothe present invention may be formed from a silver alloy, and theintermediate layer may be formed from a MoNb alloy.

In an sixth aspect of the present invention, a touchscreen panel sensorfilm with a transparent base film and transparent electrical conductorpatterns provided on both surfaces of the base film, may further includeone pair of index portions formed in non-active areas on both surfacesof the sensor film, the index portion pair being constructed so that oneof the paired index portions has a predetermined proximity relationshipwith respect to the other of the paired index portions.

In a touchscreen panel sensor film according to the present invention,the index portion pair may include either a two-layer film or athree-layer film; the two-layer film comprising a transparentelectrically conductive layer and a covering electrically conductivelayer arranged in that order on the base film, and the three-layer filmcomprising a transparent electrically conductive layer, an intermediatelayer, and a covering electrically conductive layer arranged in thatorder on the base film.

In a touchscreen panel sensor film according to the present invention,one of the paired index portions includes an inner profile formed todefine a light-transmitting portion therein, and the other of the pairedindex portions may be at least partly disposed internally to thelight-transmitting portion defined by the inner profile.

In a touchscreen panel sensor film according to the present invention,the paired index portions each include a plurality of unit indexportions arranged at predetermined pitches in one direction, and thepitch of the unit index portions of one of the paired index portions maybe different from that of the unit index portions of the other of thepaired index portions.

A touchscreen panel sensor film according to seventh aspect of thepresent invention includes

a transparent base film,

a transparent electrical conductor provided on one surface of the basefilm, and

electrical lead-out conductors provided on a portion of the transparentelectrical conductor spacedly from the base film,

wherein the portion of the transparent electrical conductor is formedlinearly, and the electrical lead-out conductors linearly extend along asurface of the transparent electrical conductor portion, and

wherein width of the linearly extending electrical lead-out conductorsis smaller than that of the transparent electrical conductor portionexisting at overlaps of the electrical lead-out conductors.

A touchscreen panel sensor film according to eighth aspect of thepresent invention includes

a transparent base film having an active area corresponding to a regionformed to enable detection of a touch position, and a non-active areaadjacent to the active area,

a transparent electrical conductor provided on one surface of the basefilm, the transparent electrical conductor including a sensor portiondisposed on the active area of the base film, and a terminal portioncoupled to the sensor portion and disposed on the non-active area of thebase film, and

an electrical lead-out conductor provided on a portion of the terminalportion of the transparent electrical conductor spacedly from the basefilm,

wherein the portion of the transparent electrical conductor is formedlinearly and the electrical lead-out conductors linearly extend along asurface of the transparent electrical conductor portion,

wherein the electrical lead-out conductor is disposed on the portion ofterminal portion of the transparent electrical conductor disposed on thenon-active area so as not to have an end adjacent to an end of thesensor portion of the transparent electrical conductor disposed on theactive area, and

wherein the terminal portion of the transparent electrical conductor isformed integrally with, and from the same material as that of, thesensor portion of the transparent electrical conductor.

In a ninth aspect of the present invention, a method for manufacturing atouchscreen panel sensor film includes the steps of:

forming a photosensitive layer having a photosensitive property, on asurface of a laminate including a transparent base film, a transparentelectrically conductive layer provided on one surface of the base film,and a covering electrically conductive layer provided on the transparentelectrically conductive layer, the photosensitive layer being formedupon the covering electrically conductive layer,

exposing the photosensitive layer to light,

developing the photosensitive layer, thereby patterning thephotosensitive layer,

patterning the covering electrically conductive layer by etching thecovering electrically conductive layer, using the patternedphotosensitive layer as a mask,

patterning the transparent electrically conductive layer by etching thetransparent electrically conductive layer using the patternedphotosensitive layer and the patterned covering electrically conductivelayer as masks,

removing the patterned photosensitive layer,

forming another photosensitive layer on the patterned coveringelectrically conductive layer,

exposing the other photosensitive layer to light,

patterning the other photosensitive layer by means of development,

removing a portion of the patterned covering electrically conductivelayer by etching the patterned covering electrically conductive layer,using the patterned other photosensitive layer as a mask, and

removing the patterned other photosensitive layer.

In a tenth aspect of the present invention, a method for manufacturing atouchscreen panel sensor film includes the steps of:

forming a first photosensitive layer having a photosensitive property,on one surface of a laminate including a transparent base film, a firsttransparent electrically conductive layer provided on one surface of thebase film, a second transparent electrically conductive layer providedon the other surface of the base film, and a light-shieldingelectrically conductive layer having a light-shielding property and anelectrically conductive property, the light-shielding electricallyconductive layer being provided on at least one transparent electricallyconductive layer of the first transparent electrically conductive layerand the second transparent electrically conductive layer; and forming asecond photosensitive layer having a photosensitive property, on theother surface of the laminate,

exposing the first photosensitive layer and the second photosensitivelayer to light at the same time in patterns different from each other,with a first mask placed on the first photosensitive layer and a secondmask placed on the second photosensitive layer,

developing the first photosensitive layer and the second photosensitivelayer, thereby patterning the first and second photosensitive layers,

patterning the light-shielding electrically conductive layer by etchingthe light-shielding electrically conductive layer, using the patternedphotosensitive layer as a mask,

patterning the first transparent electrically conductive layer and thesecond transparent electrically conductive layer into pattern shapesdifferent from each other, by etching the first and second transparentelectrically conductive layers using the patterned photosensitive layerand the patterned light-shielding electrically conductive layer asmasks,

removing the patterned first photosensitive layer and secondphotosensitive layer,

forming another photosensitive layer on the patterned light-shieldingelectrically conductive layer,

exposing the other photosensitive layer to light,

patterning the other photosensitive layer by means of development,

removing a portion of the patterned light-shielding electricallyconductive layer by etching the patterned light-shielding electricallyconductive layer, using the patterned other photosensitive layer as amask, and

removing the patterned other photosensitive layer.

The touchscreen panel sensor film of the present invention,characterized in that alignment marks or product information is formed,improves position accuracy of the alignment marks or productinformation, improves processing accuracy in post-processing steps suchas sheet cutting, individual-piece cutting, individual-piecepunching-through, and FPC attaching, and hence improves machine-readingaccuracy of the product information, especially that of bar codeinformation.

The alignment marks or the product information is consisted of either atwo-layer film or a three-layer film; the two-layer film comprising atransparent electrically conductive layer and a covering electricallyconductive layer arranged in that order on the base film, and thethree-layer film comprising a transparent electrically conductive layer,an intermediate layer, and a covering electrically conductive layerarranged in that order on the base film. The alignment marks or theproduct information is generated in the same step as that of forming thecovering electrically conductive layer. Therefore, the positions of thealignment marks or product information do not shift, which improvesprocessing accuracy in the post-processing steps. In addition, even whenformed on both surfaces of the base film, the alignment marks or theproduct information is generated in the same step as that of forming thecovering electrically conductive layer, such that the alignment marks orthe product information can be formed without a shift in position withrespect to the transparent conductive layer or a transparent electricalconductor.

Furthermore, since the alignment marks are each formed so that onealignment mark suits a plurality of purposes of use of the mark, asurface area for disposing the alignment marks is minimized for evennarrower frame or bezel regions.

Furthermore, the product information includes at least one kind ofinformation among product name information, lot number information,manufacturing date information, and product grade information, so theproduct information can be confirmed after individual-piece cutting andmounting in a touchscreen panel device. Machine-readable informationsuch as a bar code is additionally formed, so product management ispossible in post-processing steps such as mounting in the touchscreenpanel device.

In a further aspect of the present invention, a method for manufacturinga touchscreen panel sensor film including a transparent base film, atransparent electrical conductor pattern provided on at least onesurface of the base film, with a portion of the conductor pattern beinglinearly formed on the surface of the base film, and alignment marksor/and product information formed in a non-active area.

The method includes the steps of:

forming a photosensitive layer having a photosensitive property, on asurface of a laminate including the base film, a transparentelectrically conductive layer provided on at least one surface of thebase film, and a covering electrically conductive layer provided on thetransparent electrically conductive layer, the photosensitive layerbeing formed upon the covering electrically conductive layer,

exposing the photosensitive layer to light,

developing the photosensitive layer, thereby patterning a sensorportion, a terminal portion, electrical lead-out lines, and thealignment marks or/and the product information,

patterning the covering electrically conductive layer by etching thecovering electrically conductive layer, using the patternedphotosensitive layer as a mask,

patterning the transparent electrically conductive layer by etching thetransparent electrically conductive layer using the patternedphotosensitive layer and the patterned covering electrically conductivelayer as masks,

removing the patterned photosensitive layer,

forming another photosensitive layer on the patterned coveringelectrically conductive layer,

exposing the other photosensitive layer to light,

patterning the other photosensitive layer by means of development,

removing a portion of the patterned covering electrically conductivelayer by etching the patterned covering electrically conductive layer,using the patterned other photosensitive layer as a mask, therebyforming the sensor portion, and

removing the patterned other photosensitive layer.

Due to the above method, it is possible to make the touchscreen panelsensor film which has the alignment marks or/and product informationformed with a high degree of position accuracy in the same steps ofthose of the touchscreen panel sensor, without involving a new step.

In a further aspect of the present invention, a method for manufacturinga touchscreen panel sensor film including a transparent base film, atransparent electrical conductor pattern provided on at least onesurface of the base film, with a portion of the conductor pattern beinglinearly formed on the surface of the base film, and alignment marksor/and product information formed in a non-active area.

The method includes the steps of:

forming a photosensitive layer having a photosensitive property, on asurface of a laminate including the base film, a transparentelectrically conductive layer provided on at least one surface of thebase film, an intermediate layer provided on the transparent conductivelayer, and a covering electrically conductive layer provided on theintermediate layer, the photosensitive layer being formed upon thecovering electrically conductive layer,

exposing the photosensitive layer to light,

developing the photosensitive layer, thereby patterning a sensorportion, a terminal portion, electrical lead-out lines, and thealignment marks or/and the product information,

patterning the covering electrically conductive layer and theintermediate layer by etching the covering electrically conductive layerand the intermediate layer, using the patterned photosensitive layer asa mask,

patterning the transparent electrically conductive layer by etching thetransparent electrically conductive layer using the patternedphotosensitive layer and the patterned covering electrically conductivelayer and intermediate layer as masks,

removing the patterned photosensitive layer,

forming another photosensitive layer on the patterned coveringelectrically conductive layer,

exposing the other photosensitive layer to light,

patterning the other photosensitive layer by means of development,

removing portions of the patterned covering electrically conductivelayer and intermediate layer by etching the patterned coveringelectrically conductive layer and intermediate layer, using thepatterned other photosensitive layer as a mask, thereby forming thesensor portion, and

removing the patterned other photosensitive layer.

Due to the above method, it is possible to make the touchscreen panelsensor film which has the alignment marks or/and product informationformed with a high degree of position accuracy in the same steps ofthose of the touchscreen panel sensor, without involving a new step.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an explanatory diagram of a first embodiment of the presentinvention, schematically showing a touchscreen panel device along with adisplay device.

FIG. 2 is a sectional view showing a touchscreen panel sensor of thetouchscreen panel device of FIG. 1 along with the display device, thesection view of FIG. 2 corresponding nearly to a section extending alongline II-II of FIG. 1.

FIG. 3A is a top view showing the touchscreen panel sensor of thetouchscreen panel device.

FIG. 3B is a sectional view taken along line III-III of FIG. 3A.

FIGS. 4(a) and 4(b) are sectional views that show more specific examplesof a base film included in the touchscreen panel sensor.

FIG. 5A is an explanatory diagram of a method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5B is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5C is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5D is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5E is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5F is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5G is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5H is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5I is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5J is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5K is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 5L is an explanatory diagram of the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 6 is a flowchart for illustrating the method for manufacturing thetouchscreen panel sensor shown in FIGS. 3A and 3B.

FIG. 7 is a diagram that illustrates progress of etching in a step shownin FIG. 5F.

FIG. 8A, which corresponds to FIG. 5I(a), illustrates a modification ofthe method for manufacturing the touchscreen panel sensor.

FIG. 8B, which corresponds to FIG. 5J(a), illustrates a modification ofthe method for manufacturing the touchscreen panel sensor.

FIGS. 9(a) and 9(b), which correspond to FIGS. 5C(a) and 5C(b),respectively, illustrate another modification of the method formanufacturing the touchscreen panel sensor.

FIG. 10, which corresponds to FIG. 3A, illustrates a modification of atransparent electrical conductor.

FIG. 11, which corresponds to FIG. 3B, is a sectional view showing aconventional touchscreen panel sensor.

FIG. 12(a), which also corresponds to FIG. 3B in the first embodiment,is a sectional view showing a first electrical lead-out conductor in asecond embodiment of the present invention, and FIG. 12(b) is asectional view showing a second electrical lead-out conductor in thesecond embodiment of the present invention.

FIG. 13 is a sectional view showing a laminate in the second embodimentof the present invention.

FIG. 14 is an overall view of a sensor film for the touchscreen panelsensor of the present invention.

FIG. 15 is a view of the touchscreen panel sensor film obtained aftersheet cutting of the sensor film in the present invention.

FIG. 16 is a view of a unit pattern of the touchscreen panel sensorfabricated on the sensor film for the touchscreen panel sensor of thepresent invention.

FIG. 17 shows an example of position matching that uses a pattern of theelectrical lead-out conductor, FIG. 17 being a top view of thetouchscreen panel sensor.

FIG. 18A is a top view that shows a unit pattern of a touchscreen panelsensor in a third embodiment.

FIG. 18B is a sectional view of the touchscreen panel sensor shown inFIG. 18A.

FIGS. 19(a), 19(b), and 19(c) are diagrams illustrating a method ofevaluating the position accuracy of the touchscreen panel sensor patternusing one pair of index portions shown in FIGS. 18A and 18B.

FIG. 20 is a sectional view showing a modification of a layerconfiguration of one pair of index portions.

FIG. 21 is a diagram illustrating a method of evaluating the patternaccuracy of the touchscreen panel sensor pattern using the paired indexportions shown in FIG. 20.

FIGS. 22(a) and 22(b) are diagrams illustrating other methods ofevaluating the position accuracy of touchscreen panel sensor patternusing the paired index portions shown in FIG. 20.

FIGS. 23(a) to 23(d) are diagrams each showing a specific geometricalmodification of one pair of index portions.

FIG. 24 is a diagram showing a modification of a pattern of one pair ofindex portions.

FIG. 25 is a diagram illustrating a method of evaluating the patternaccuracy of touchscreen panel sensor using the paired index portionsshown in FIG. 24.

FIG. 26 is a diagram showing a modification of the paired index portionsshown in FIG. 24.

FIG. 27 is a top view showing an example in which one pair of indexportions are formed on a touchscreen panel sensor having a plurality ofunit patterns created by step-and-repeat imposition.

DETAILED DESCRIPTION OF THE INVENTION First Embodiment

Hereunder, a first embodiment of the present invention will be describedreferring to the accompanying drawings.

In the drawings attached to this specification, scales and dimensionalaspect ratios are changed and exaggerated with respect to actual onesfor convenience's sake of illustration and for better understanding ofthe invention.

The terms “sheet”, “film”, and “plate” that will appear herein are basedonly upon the differences in designation, and are not distinguished fromone another. Therefore, the term “sheet”, for example, means a conceptincluding such a member and portion as one may call a film, a plate, orthe like.

FIGS. 1 to 6 illustrate the first embodiment of the present invention.Of these figures, FIG. 1 is a diagram schematically showing atouchscreen panel device along with a display device, FIG. 2 is asectional view showing a touchscreen panel sensor of the touchscreenpanel device of FIG. 1 along with the display device, FIGS. 3A and 3Bare a top view and a sectional view, respectively, showing thetouchscreen panel sensor of the touchscreen panel device, and FIGS. 4(a)and 4(b) are diagrams that show more specific examples of a base filmincluded in the touchscreen panel sensor. In addition, FIGS. 5A to 5Lare explanatory diagrams of a method for manufacturing the touchscreenpanel sensor shown in FIGS. 3A and 3B. Furthermore, FIG. 6 is aflowchart for illustrating the method for manufacturing the touchscreenpanel sensor shown in FIGS. 3A and 3B.

The touchscreen panel device 20 shown in FIGS. 1 to 3B is constructed asa projected type of capacitive-coupling scheme to detect a contactposition of an external conductor (e.g., a human finger) with respect tothe touchscreen panel device. When the touchscreen panel device 20 ofthe capacitive-coupling scheme has excellent detection sensitivity, amere approach of the external conductor to the touchscreen panel deviceenables the device to detect what region of the device the externalconductor is approaching. The wording “contact position” used hereinalong with this event means a concept including an approach positionthat actually does not mean a contact position but is detectable.

As shown in FIGS. 1 and 2, the touchscreen panel device 20 is used incombination with the display device (e.g., liquid-crystal displaydevice) 15, thereby constituting an input/output device 10. Theillustrated display device 15 is constructed as a flat-panel display.The display device 15 includes a display panel 16 having a displaysurface 16 a, and a display controller 17 connected to the display panel16. The display panel 16 includes a display region A1 for displaying animage, and a non-display region (also called a frame region or bezelregion) A2 disposed externally and around the display region A1. Thedisplay controller 17 processes image information relating to the imageto be displayed, and drives the display panel 16 in accordance with theimage information. The display panel 16 receives a control signal fromthe display controller 17 and displays the predetermined image on thedisplay surface 16 a. That is, the display device 15 functions as anoutput device to output characters, figures/graphics, and otherinformation, as images.

The touchscreen panel device 20 includes a touchscreen panel sensor 30disposed on the display surface 16 a of the display device 15, and adetection controller 25 connected to the touchscreen panel sensor 30. Asshown in FIG. 2, the touchscreen panel sensor 30 is attached to thedisplay surface 16 a of the display device 15 via an adhesive layer 19.As discussed above, the touchscreen panel device 20 is constructed asthe projected type of capacitive-coupling scheme, and functions as aninput device for entering information.

As shown in FIG. 2, the touchscreen panel device 20 also includes aprotective cover 12 having a light-transmitting property, at anobserver's side of the touchscreen panel sensor 30, that is, at a sideopposite to the display device 15. The cover 12 functions as adielectric. The protective cover 12 is attached to the surface of thetouchscreen panel sensor 30 via an adhesive layer 14. The protectivecover 12 functions as an input surface (touch surface, contact surface)with respect to the touchscreen panel device 20. This means thatbringing the conductor, for example the human finger 5, into contactwith the protective cover 12 enables information to be input from theoutside to the touchscreen panel device 20. The protective cover 12forms the surface of the input/output device 10 that is usually theclosest of all its elements with respect to the observer. In theinput/output device 10, the cover 12 also functions as a cover forprotecting the touchscreen panel device 20 and the display device 15from the outside.

The adhesive layers 14, 19 mentioned above can be layers formed fromvarious materials each having an adhesive nature. In addition, thewording “attach” and “adhesive (layer)” in this specification are usedto denote a concept including “cohere/stick” and“coherent/pressure-sensitive (layer)”.

The detection controller 25 of the touchscreen panel device 20,connected to the touchscreen panel sensor 30, processes the informationthat has been entered via the protective cover 12. More specifically,the detection controller 25 includes a detection circuit composed sothat when the conductor (typically, the human finger) 5 is in contactwith the protective cover 12, the circuit can identify a position on theprotective cover 12 where the conductor 5 is in contact with the cover.The detection controller 25 is also connected to the display controller17 of the display device 15 so as to transmit processed inputinformation to the display controller 17. In this case, the displaycontroller 17 can create image information based on the inputinformation, and display this image on the display panel 16.

The terms “capacitive-coupling scheme” and “projected (type of)capacitive-coupling scheme” in the present invention are used to meansubstantially the same as used in the field of touchscreen panels. Inthe field of touchscreen panels, the “capacitive-coupling scheme” isalso called the “electrostatic capacitive scheme”, the“electrostatic-capacitive coupling scheme” or the like. In the presentinvention, the “capacitive-coupling scheme” is dealt with as a synonymfor the terms “electrostatic capacitive scheme”,“electrostatic-capacitive coupling scheme”, and the like. A typicaltouchscreen panel device of the electrostatic-capacitive coupling schemeincludes an electrical conductor layer, and forms electrostatic capacitybetween an external conductor (typically, a human finger) and theelectrical conductor layer of the touchscreen panel device when theexternal conductor comes into contact with the touchscreen panel. Achange in electrical state due to the formation of the electrostaticcapacity is then used as a basis for identifying position coordinates ofa position on the touchscreen panel where the external conductor is incontact therewith. In addition, in the field of touchscreen panels, the“projected type” of capacitive-coupling scheme is also called the“projected form” of capacitive-coupling scheme or the like. In thepresent invention, the “projected type” of capacitive-coupling scheme isdealt with as a synonym for the terms “projected form” ofcapacitive-coupling scheme and the like. The “projected type” ofcapacitive-coupling scheme can be contrasted with a “surface type” ofcapacitive-coupling scheme typically having film-shaped electrodes aswell as a grid-like array of sensor electrodes.

As well shown in FIGS. 2 and 3A, the touchscreen panel sensor 30includes a base film 32, a first transparent electrical conductor 40provided in a predetermined pattern on one surface 32 a of the base film32 that is closer to the observer, and a second transparent electricalconductor 45 provided in a predetermined pattern on the other surface 32b of the base film 32 that is closer to the display device 15.Additionally, as shown in FIG. 3A, the touchscreen panel sensor 30further includes a first electrical lead-out conductor 43 provided onone section of the first transparent electrical conductor 40, and asecond electric lead-out conductor 48 provided on one section of thesecond transparent electrical conductor 45.

The base film 32 that functions as a dielectric in the touchscreen panelsensor 30 can be composed of a polyethylene terephthalate (PET) film,for example. As shown in FIG. 3A, the base film 32 includes an activearea Aa1 corresponding to a region whose touch position is detectable,and a non-active area Aa2 adjacent to the active area Aa1. As shown inFIG. 1, the active area Aa1 of the touchscreen panel sensor 30 occupiesa region facing the display region A1 of the display device 15. Thenon-active area Aa2 is formed so that it surrounds the active area Aa1of a rectangular shape from all directions or sides. In other words, thenon-active area Aa2 is of a frame form or a bezel form. The non-activearea Aa2 is formed in a region facing the non-display region A2 of thedisplay device 15.

A sensor electrode 37 a capable of working with the external conductor 5to form a capacitive coupling between both is provided on the activearea Aa1 of the base film 32. An electrical lead-out line 37 b connectedto the sensor electrode 37 a is provided on the non-active area Aa2 ofthe base film 32. The lead-out line 37 b is electrically connected atone end thereof to the sensor electrode 37 a, and at the other endthereof to the detection circuit of the detection controller 25 that isconfigured to detect the contact position of the external conductor withrespect to the display surface 12. In the present embodiment, as shownin FIG. 3A, the first transparent electrical conductor 40 and the secondtransparent electrical conductor 45 each have only a portion placed onthe active area Aa1 of the base film 32. These portions of the firsttransparent electrical conductor 40 and the second transparentelectrical conductor 45 form the sensor electrode 37 a. The base film32, the first transparent electrical conductor 40, and the secondtransparent electrical conductor 45 have a light-transmitting property,and via these elements, the observer can observe the image displayed onthe display device 15.

In the present embodiment, a film acting as a single entity forms thebase film 32. The “single entity” here means that the film isinseparable into at least two parts. The film as the single entity,therefore, does not include a bonded structure of a plurality of filmsthat is formed by bonding the films together via an adhesive layer. Inthe meantime, a base film includes a film body and a functional filmdeposited on one surface or both surfaces of the film body by, forexample, sputtering so as to be inseparable (but, removable). The basefilm corresponds to the film of the single entity herein referred to.Examples of a base film including a functional film and a film body areshown in FIGS. 4(a) and 4(b).

In the example of FIG. 4(a), the base film 32 includes a film body 33formed from a resin (e.g., PET), and an index-matching film 34 formed onone surface or both surfaces of the film body 33. The index-matchingfilm 34 includes a plurality of high-refractive-index films 34 a andlow-refractive-index films 34 b arranged at alternate positions. Even ifthe film body 33 of the base film 32 and the transparent electricalconductors 40, 45 significantly differ in refractive index, theindex-matching film 34 prevents reflectance from significantly changingbetween the region having the transparent electrical conductors 40, 45on the base film 32, and a region not having these conductors.

In the example of FIG. 4(b), the base film 32 includes a film body 33formed from a resin (e.g., PET), and a low-refractive-index film 35formed on one surface or both surfaces of the film body 33. Even if thefilm body 33 of the base film 32 and the transparent electricalconductors 40, 45 significantly differ in refractive index, thelow-refractive-index film 35 prevents spectral characteristics oftransmittance from significantly changing between the region having thetransparent electrical conductors 40, 45 on the base film 32, and aregion not having these conductors. Thus, uniform transmittance invarious wavelength regions can be achieved.

Next, the first transparent electrical conductor 40 and the secondtransparent electrical conductor 45 will be described in further detail.

The first transparent electrical conductor 40 and the second transparentelectrical conductor 45 are both formed from an electrically conductivematerial, for example, indium tin oxide (ITO), and electricallyconnected to the detection circuit of the detection controller 25 fordetecting the contact position of the external conductor 5 with respectto the display surface 12. The first transparent electrical conductor 40has a large number of first sensor portions (first sensor conductors,sensor electrodes) 41 arranged on the active area Aa1 of the base film32, and a large number of first terminal portions (first terminalconductors) 42 arranged on the non-active area Aa2 of the base film 32so that the first terminal portions 42 are each coupled to specific oneof the first sensor portions 41. Likewise, the second transparentelectrical conductor 45 has a large number of second sensor portions(second sensor conductors, sensor electrodes) 46 arranged on the activearea Aa1 of the base film 32, and a large number of second terminalportions (second terminal conductors) 47 arranged on the non-active areaAa2 of the base film 32 so that the second terminal portions 47 are eachcoupled to specific one of the second sensor portions 46.

Each first sensor portion 41 of the first transparent electricalconductor 40 is disposed in a predetermined pattern on one surface 32 aof the base film 32 that is closer to the observer. Each second sensorportion 46 of the second transparent electrical conductor 45 is disposedin a predetermined pattern which is different from the pattern of thefirst sensor portion 41 of the first transparent electrical conductor40, on the other surface 32 b of the base film 32 that is closer to thedisplay device 15. More specifically, as shown in FIG. 3A, the firstsensor portion 41 of the first transparent electrical conductor 40 isconstructed as linear conductors arranged next to one another in onedirection along the film surface of the base film 32. Additionally, thesecond sensor portion 46 of the first transparent electrical conductor40 is constructed as linear conductors arranged next to one another inthe other direction crossing the above arrangement direction, along thefilm surface of the base film 32. In the present embodiment, the onedirection that is the arrangement direction of the first sensor portion41, and the other direction that is the arrangement direction of thesecond sensor portion 46 are orthogonal to each other on the filmsurface of the base film 32.

As shown in FIG. 3A, each of the linear conductors forming the firstsensor portion 41 extends linearly in a direction crossing thearrangement direction of these conductors (i.e., the one direction).Similarly, each of the linear conductors forming the second sensorportion 46 extends linearly in a direction crossing the arrangementdirection of these conductors (i.e., the other direction). In theillustrated example, in particular, the first sensor portion 41 extendslinearly in the orthogonal direction (the other direction) relative tothe arrangement direction (the one direction) of the constituentconductors. The second sensor portion 46 extends linearly in theorthogonal direction (the one direction) relative to the arrangementdirection (the other direction) of the constituent conductors.

In the present embodiment, the first sensor portion 41 includes a linearportion 41 a extending in linear form, and a bulged portion 41 b bulgedfrom the linear portion 41 a. In the illustrated example, the linearportion 41 a extends linearly in the direction crossing the arrangementdirection of the first sensor portion 41. The bulged portion 41 b isbulged from the linear portion 41 a along the film surface of the basefilm 32. Width of the first sensor portion 41 is therefore great at thesection having the bulged portion 41 b. As shown in FIG. 3A, the firstsensor portion 41 in the present embodiment has an outer profile nearlyof a square shape in plan view, at the bulged portion 41 b.

The second sensor portion 46 included in the second transparentelectrical conductor 45 is constructed similarly to the first sensorportion 41 included in the first transparent electrical conductor 40.That is, the second sensor portion 46 included in the second transparentelectrical conductor 45 includes a linear portion 46 a extending inlinear form, and a bulged portion 46 b bulged from the linear portion 46a. In the illustrated example, the linear portion 46 a extends linearlyin the direction crossing the arrangement direction of the second sensorportion 46. The bulged portion 46 b is bulged from the linear portion 46a along the film surface of the base film 32. Width of the second sensorportion 46 is therefore great at the section having the bulged portion46 b. As shown in FIG. 3A, the second sensor portion 46 in the presentembodiment has an outer profile nearly of a square shape in plan view,at the bulged portion 46 b.

As shown in FIG. 3A, when the first sensor portion 41 included in thefirst transparent electrical conductor 40 is observed from a normal-linedirection of the film surface of the base film 32 (i.e., in plan view),the first sensor portion 41 crosses the large number of second sensorportions 46 included in the second transparent electrical conductor 45.As shown in FIG. 3A, the bulged portion 41 b of the first transparentelectrical conductor 40 is disposed between crossing points relative toany two adjacent second sensor portions 46, on the first sensor portion41. Similarly, when observed from the normal-line direction of the filmsurface of the base film 32, the second sensor portion 46 included inthe second transparent electrical conductor 45 crosses the large numberof first sensor portions 41 included in the first transparent electricalconductor 40. The bulged portion 46 b of the second transparentelectrical conductor 45 is disposed between crossing points relative toany two adjacent first sensor portions 41, on the second sensor portion46. Additionally, in the present embodiment, the bulged portion 41 b ofthe first sensor portion 41 included in the first transparent electricalconductor 40, and the bulged portion 46 b of the second sensor portion46 included in the second transparent electrical conductor 45 arearranged so as not to overlap each other when observed from thenormal-line direction of the film surface of the base film 32. In otherwords, the first sensor portion 41 included in the first transparentelectrical conductor 40, and the second sensor portion 46 included inthe second transparent electrical conductor 45 cross each other only atthe linear portions 41 a, 46 a of each sensor portion 41, 46 whenobserved from the normal-line direction of the film surface of the basefilm 32.

As described above, the first transparent electrical conductor 40 hasfirst terminal portions 42 coupled to such first sensor portions 41.Depending on a method of detecting the contact position, one or twofirst terminal portions 42 are provided for each of the first sensorportions 41. Each first terminal portion 42 linearly extends from an endof a corresponding first sensor portion 41. Likewise, the secondtransparent electrical conductor 45 has second terminal portions 47coupled to the second sensor portions 46. Depending on the method ofdetecting the contact position, one or two second terminal portions 47are provided for each of the second sensor portions 46. Each secondterminal portion 47 linearly extends from an end of a correspondingsecond sensor portion 46. As shown in FIG. 3A, in the presentembodiment, the first terminal portion 42 is integrally formed from thesame material as that of the first sensor portion 41, and the secondterminal portion 47 is integrally formed from the same material as thatof the second sensor portion 46.

Next, the first lead-out conductor 43 and the second lead-out conductor48 are detailed below. As mentioned above, the first lead-out conductor43 is disposed on one section of the first transparent electricalconductor 40, and the second lead-out conductor 48 is disposed on onesection of the second transparent electrical conductor 45. Morespecifically, the first lead-out conductor 43 is disposed on one part ofthe first terminal portion 42 of the first transparent electricalconductor 40, and the second lead-out conductor 48 is disposed on onepart of the second terminal portion 47 of the second transparentelectrical conductor 45. In other words, the first lead-out conductor 43is disposed in the non-active area Aa2 on one surface 32 a of the basefilm 32, and the second lead-out conductor 48 is disposed in thenon-active area Aa2 on the other surface 32 b of the base film 32.

As shown in FIG. 3A, the first terminal portion 42 of the firsttransparent electrical conductor 40 and the second terminal portion 47of the second transparent electrical conductor 45 are formed linearly.The first lead-out conductor 43 extends linearly in the same pattern asthat of a portion of the linearly formed first terminal portion 42 thatis other than a neighboring portion of a connection to the first sensorportion 41. Likewise, as shown, the second lead-out conductor 48 extendslinearly in the same pattern as that of a portion of the linearly formedsecond terminal portion 47 that is other than a neighboring portion of aconnection to the second sensor portion 46.

In addition, as shown in FIG. 3B, the first lead-out conductor 43 isdisposed on the first transparent electrical conductor 40 spacedly fromthe base film 32. That is, the first lead-out conductor 43 is not incontact with the base film 32. As a result, the section of the firsttransparent electrical conductor 40 that is overlaid with the firstlead-out conductor 43 is exposed in a lateral direction between the basefilm 32 and the first lead-out conductor 43. In the present embodiment,in particular, width of the first lead-out conductor 43 is the same asor slightly smaller than that of a part of the first terminal portion 42of the first transparent electrical conductor 40 that is overlaid withthe first lead-out conductor 43.

Although not shown, the second lead-out conductor 48 is constructedsimilarly to the first lead-out conductor 43. That is, the secondlead-out conductor 48 is disposed on the second transparent electricalconductor 45 spacedly from the base film 32, and is not in contact withthe base film 32. As a result, the section of the second transparentelectrical conductor 45 that is overlaid with the second lead-outconductor 48 is exposed in a lateral direction between the base film 32and the second lead-out conductor 48. In the present embodiment, inparticular, width of the second lead-out conductor 48 is the same as orslightly smaller than that of a part of the second terminal portion 47of the second transparent electrical conductor 45 that is overlaid withthe second lead-out conductor 48.

The first lead-out conductor 43 works with the first terminal portion 42of the first transparent electrical conductor 40 to constitute thelead-out line 37 b for connecting the sensor electrode 37 a to thedetection controller 25. The sensor electrode 37 a includes the firstsensor portion 41 of the first transparent electrical conductor 40. Thesecond lead-out conductor 48 works with the second terminal portion 47of the second transparent electrical conductor 45 to constitute thelead-out line 37 b for connecting the sensor electrode 37 a to thedetection controller 25. The sensor electrode 37 a includes the secondsensor portion 46 of the second transparent electrical conductor 45.Since the first lead-out conductor 43 and the second lead-out conductor48 are arranged on the non-active area Aa2, these conductors do not needto be formed from a material having a light-transmitting property, andis capable of being formed from a material having an excellent,electrically conductive property. In the present embodiment, the firstlead-out conductor 43 and the second lead-out conductor 48 are formedfrom a material having higher electrical conductivity than the materialforming the first transparent electrical conductor 40 and the secondtransparent electrical conductor 45. More specifically, the firstlead-out conductor 43 and the second lead-out conductor 48 can be formedusing a metallic material, such as aluminum, molybdenum, silver,chromium, or copper, that has a light-shielding property and has muchhigher electrical conductivity than that of a transparent electricalconductor formed from ITO or other materials.

In the touchscreen panel sensor 30 having the above-describedconfiguration, the lead-out line 37 b formed by the lead-out conductor43, 48 and the terminal portion 42, 47 of the transparent electricalconductor 40, 45, is connected to the detection controller 25 via anexternal connection line not shown. Additionally, in accordance with thetouchscreen panel sensor 30 having the above-described configuration,even if the touchscreen panel sensor 30 undergoes a bending pressure,for example, and becomes deformed, the lead-out conductor 43, 48 and theterminal portion 42, 47 of the transparent electrical conductor 40, 45are maintained in an interconnected state as described below. Therefore,stable electrical continuity between the sensor electrode 37 a and thedetection controller 25 is ensured.

While the lead-out conductor 43, 48 made of a metal or any othermaterial having high electrical conductivity has some degree of adhesionwith respect to the transparent electrical conductor 40, 45, thelead-out conductor 43, 48 is low in adhesive strength with respect tothe base film 32 formed from a resin, glass, or the like. Accordingly,as in FIG. 11, for example, when a conductor of high electricalconductivity is in contact with a base material formed from a resin,glass, or the like, this contact position forms a starting point ofpeeling-off and if the base material becomes deformed as shown with adouble-dashed line, the conductor of high electrical conductivity easilypeels off from the base material. In particular, in a case of thetransparent electrical conductor being totally covered with theconductor of high electrical conductivity, rigidity of the transparentelectrical conductor and the conductor of high electrical conductivityas a whole is increased. This makes the two conductors less prone todeformation since both follow the deformation of the base material.Partly because of this, the conductor of high electrical conductivitybecomes prone to peel off from the base material.

On the other hand, in accordance with the present embodiment, since thelead-out conductor 43, 48 is spaced from the base film 32, the startingpoint of the peeling-off of the lead-out conductor 43, 48 from the basefilm 32 is not formed. In addition, the lead-out conductor 43, 48 isonly rested upon the transparent electrical conductor 40, 45 and doesnot cover the transparent electrical conductor 40, 45 from a lateraldirection. This makes the transparent electrical conductor 40, 45 easilyfollow the deformation of the base film 32 and become deformed, whichalso makes the transparent electrical conductor 40, 45 less prone topeel off from the base film 32. For these reasons, in accordance withthe touchscreen panel sensor 30 of the present embodiment, even if thetouchscreen panel sensor 30 undergoes a bending pressure, for example,and becomes deformed, the lead-out conductor 43, 48 and the terminalportion 42, 47 of the transparent electrical conductor 40, 45 aremaintained in the interconnected state. Therefore, stable electricalcontinuity between the sensor electrode 37 a and the detectioncontroller 25 is ensured.

Furthermore, as shown in FIG. 3B, the lead-out conductor 43, in thetouchscreen panel sensor 30 having the above configuration is onlydisposed on the terminal portion 42, 47 of the transparent electricalconductor 40, 45 and does not extend to a lateral region of the terminalportion 42, 47 of the transparent electrical conductor 40, 45.Therefore, the entire lead-out line 37 b formed by the lead-outconductor 43, 48 and the terminal portion 42, 47 of the transparentelectrical conductor 40, 45, can be reduced in line width. This, inturn, enables the lead-out lines 37 b of the same conductivity to bearranged at shorter pitches, and thus an arrangement space for thelead-out lines 37 b, that is, a surface area of the non-active area Aa2,to be reduced.

Next, the method for manufacturing the touchscreen panel sensor 30 ofthe above configuration, in line with the flowchart shown in FIG. 6 isdescribed below referring to FIGS. 5A to 5L. In each of FIGS. 5A to 5L,sectional view (a) shows the work-in-progress touchscreen panel sensor(laminate) in a section corresponding to a section depicted along lineV-V in FIG. 3A. In addition, in each of FIGS. 5A to 5L, top view (b)shows the work-in-progress touchscreen panel sensor (laminate) as viewedfrom one side (an upper side of each sectional view (a) on the paper).

As shown in FIGS. 6 and 5A, the laminate (also called “blanks”) as thebase material for manufacturing the touchscreen panel sensor 30 is firstprovided (step S1). The touchscreen panel sensor 30 is obtained byconducting film deposition, patterning, and/or other processing, uponthe laminate 50.

As shown in sectional view (a) of FIG. 5A, the laminate 50 provided inthe present embodiment includes a transparent base film 32, a firsttransparent electrically conductive layer 52 a laminated on one surface32 a of the base film 32, a second transparent electrically conductivelayer 52 b laminated on the other surface 32 b of the base film 32 andhaving a light-transmitting property, a first covering electricallyconductive layer 54 a laminated on the first transparent electricallyconductive layer 52 a, and a second covering electrically conductivelayer 54 b laminated on the second transparent electrically conductivelayer 52 b. That is, alignment marks and product information in thepresent embodiment, as with the lead-out conductors 43, 48, are formedon a two-layer film obtained by laminating the transparent conductivelayers 52 a, 52 b and the covering conductive layers 54 a, 54 b on therespective surfaces 32 a, 32 b of the base film 32. Additionally, thealignment marks and product information in the present embodiment, aswith the lead-out conductors 43, 48, can be formed on both surfaces 32 aand 32 b of the base film 32. The product information includes at leastone of a product name, a lot number, a manufacturing date, and productgrade, thus enabling confirmation of the product information afterindividual-piece cutting and mounting in the touchscreen panel device.Furthermore, machine-readable information such as bar codes is formed,which in turn enables product management/control during post-processingsuch as mounting in the touchscreen panel device.

As described above, the base film 32 can be a resin film such as a PETfilm. Alternatively, as shown in FIGS. 4(a) and 4(b), the base film 32may include the film body 33 formed from a resin such as PET, and thefunctional film 34, 35 formed on one surface or both surfaces of thefilm body 33.

The first transparent conductive layer 52 a and the second transparentconductive layer 52 b, as will be described later herein, are patternedto form respectively the first transparent electrical conductor 40 andsecond transparent electrical conductor 45 having a light-transmittingproperty. Therefore, the first transparent conductive layer 52 a and thesecond transparent conductive layer 52 b are formed from a materialhaving a light-transmitting property and a conductive property. As anexample, the first transparent conductive layer 52 a and the secondtransparent conductive layer 52 b can be formed as an ITO film depositedon the surfaces 32 a, 32 b of the base film 32 by sputtering.

The first covering conductive layer 54 a and the second coveringconductive layer 54 b, as will be described later, are patterned to formrespectively the first lead-out conductors 43, 48 having highconductivity. Therefore, the first covering conductive layer 54 a andthe second covering conductive layer 54 b are suitably formed from amaterial having higher conductivity than that of the material formingthe transparent conductive layers 52 a, 52 b.

In addition, the first covering conductive layer 54 a and the secondcovering conductive layer 54 b are layers having a light-shieldingproperty against light used for light-exposure of photosensitive layers56 a and 56 b described later herein. That is, the first and secondcovering conductive layers do not permit the exposure light to passtherethrough. In the present embodiment, however, the first and secondcovering conductive layers are formed as layers having a light-shieldingproperty against not only the exposure light for the photosensitivelayers 56 a, 56 b, but also light of other wavelength regions. Morespecifically, the first and second covering conductive layers are formedas the layers having the property of shielding visible light,ultraviolet radiation, infrared radiation, and other radiation containedin natural light. Using these layers as the covering conductive layers54 a, 54 b is expected to block the exposure light more reliably.

Varieties of materials are known to be useable to form the firstcovering conductive layer 54 a and the second covering conductive layer54 b. In consideration of costs, workability/processability, and otherfactors, aluminum, molybdenum, silver, chromium, copper, or other metalscan be used. A light-blocking or light-shielding layer 54 made of ametal can be formed on one surface of the first conductive layer 52 a,that is, on the surface opposite to the base film 32, by sputtering.

It is noted that the laminate 50 of a sheet-shaped type, or the laminate50 of an elongate web-shaped type, for example, taken up onto a roll maybe provided. In consideration of production efficiency, however, thelaminate 50 is preferably fabricated in a different place and then takenup onto a roll before being provided. Additionally, the laminate 50 ofthe roll form is preferably unwound to be supplied in the form of a web,and then the steps described below are preferably conducted upon theweb-form laminate 50 to be supplied. An alternative preferablemanufacturing method is to, after unwinding the base film 32 from theroll, deliver the base film 32 from the roll, or after unwinding fromthe roll an intermediate laminate including the base film 32 and thefirst and second transparent conductive layers 52 a, 52 b, deliver theintermediate laminate from the roll, then fabricate the laminate 50 fromthe base film 32 or the intermediate laminate, and provide thefabricated laminate 50 with the steps described below.

Next, as shown in FIGS. 6 and 5B, in addition to the photosensitivelayer 56 a being formed as a first photosensitive layer on one surface50 a of the laminate 50, the photosensitive layer 56 b is formed as asecond photosensitive layer on the other surface 50 b of the laminate 50(step S2). The first photosensitive layer 56 a and the secondphotosensitive layer 56 b have a photosensitive property with respect tolight of a specific wavelength region, for example, ultravioletradiation. More specifically, the photosensitive layers 56 a, 56 b caneach be formed by coating the surface of the laminate 50 with aphotosensitive material using a coater.

After that, as shown in FIGS. 6 and 5C, the first photosensitive layer56 a and the second photosensitive layer 56 b are exposed to the lightat the same time (step S3).

More specifically, first, as shown in sectional view (a) of FIG. 5C, afirst mask 58 a is placed over the first photosensitive layer 56 a and asecond mask 58 b is placed under the second photosensitive layer 56 b.The first mask 58 a has a predetermined pattern corresponding to apattern of the first transparent electrical conductor 40 to be formed,and the second mask 58 b has a predetermined pattern corresponding to apattern of the second transparent electrical conductor 45 to be formed.The pattern of the first mask 58 a and that of the second mask 58 b aredifferent from each other.

Positioning of the first mask 58 a and the second mask 58 b is performedbased on an alignment mark 59 a provided on the first mask 58 a and thesecond mask 58 b each. In this method, the first mask 58 a and thesecond mask 58 b are positioned very accurately on an order of, forexample, microns/micrometers, and very easily (hence, rapidly), withrespect to each other.

Next as shown in sectional view (a) of FIG. 5C, the first photosensitivelayer 56 a and the second photosensitive layer 56 b are irradiated withthe exposure light (e.g., ultraviolet radiation) that matchesphotosensitive characteristics of the photosensitive layers 56 a, 56 b,via the masks 58 a, 58 b, respectively. As a result, the firstphotosensitive layer 56 a and the second photosensitive layer 56 b areexposed to the light at the same time in patterns different from eachother.

In the illustrated example, the first photosensitive layer 56 a and thesecond photosensitive layer 56 b are of a photo-positive type.Therefore, the first photosensitive layer 56 a is irradiated with theexposure light, in the pattern corresponding to a pattern of a portionremoved by etching to form the first transparent electrical conductor40, and the second photosensitive layer 56 b is irradiated with theexposure light, in the pattern corresponding to a pattern of a portionremoved by etching to form the second transparent electrical conductor45. As shown in sectional view (a) of FIG. 5C, the exposure light thathas been emitted towards the first photosensitive layer 56 a penetratesthe first photosensitive layer 56 a and reaches the laminate (blanks)50, and the exposure light that has been emitted towards the secondphotosensitive layer 56 b penetrates the second photosensitive layer 56b and reaches the laminate 50.

Here, the laminate 50 has the first covering conductive layer 54 a andsecond covering conductive layer 54 b that block the exposure light. Forthis reason, the light that has been emitted from the exposure lightsource and penetrated the first photosensitive layer 56 a is blocked bythe first covering conductive layer 54 a and thus does not reach thesecond photosensitive layer 56 b. Likewise, the light that has beenemitted from the exposure light source and penetrated the secondphotosensitive layer 56 b is blocked by the second covering conductivelayer 54 b and thus does not reach the first photosensitive layer 56 a.In other words, since the exposure light emitted in the predeterminedpattern to expose the first photosensitive layer 56 a to the light isblocked by the first covering conductive layer 54 a, the exposure lightof the predetermined pattern is not emitted towards the secondphotosensitive layer 56 b. Likewise, since the exposure light emitted inthe predetermined pattern to expose the second photosensitive layer 56 bto the light is blocked by the second covering conductive layer 54 b,the exposure light of the predetermined pattern is not emitted towardsthe first photosensitive layer 56 a. This enables the firstphotosensitive layer 56 a and the second photosensitive layer 56 b to beexposed to the light at the same time accurately in desired respectivepatterns in exposure step S3.

Next, as shown in FIGS. 6 and 5D, the exposed first photosensitive layer56 a and second photosensitive layer 56 b undergo development in stepS4. More specifically, a developing solution matching the firstphotosensitive layer 56 a and the second photosensitive layer 56 b isprovided and then this developer is used to develop the firstphotosensitive layer 56 a and the second photosensitive layer 56 b. Thusas shown in FIG. 5D, the portions, that have been irradiated with thelight from the exposure light source without being blocked by the firstmask 58 a and the second mask 58 b, are removed from the firstphotosensitive layer 56 a and the second photosensitive layer 56 b. As aresult, the first photosensitive layer 56 a and the secondphotosensitive layer 56 b have the predetermined respective patterns.

After this, as shown in FIGS. 6 and 5E, the first covering conductivelayer 54 a is etched, using the patterned first photosensitive layer 56a as a mask, and the second conductive layer 54 b is etched, using thepatterned second photosensitive layer 56 b as a mask (step S5). Thethus-etched first covering conductive layer 54 a and second coveringconductive layer 54 b have substantially the same respective patterns asthose of the first photosensitive layer 56 a and the secondphotosensitive layer 56 b. If the covering conductive layers 54 a, 54 bare made of aluminum or molybdenum, for example, aphosphoric-nitric-acetic acid aqueous solution formed by mixingphosphoric acid, nitric acid, acetic acid, and water at a rate of5:5:5:1 can be used as an etching solution. If the covering conductivelayers 54 a, 54 b are made of silver, a phosphoric-nitric-acetic acidaqueous solution formed by mixing phosphoric acid, nitric acid, aceticacid, and water at a rate of 4:1:4:4 can be used as an etching solution.If the covering conductive layers 54 a, 54 b are made of chromium, anetching solution can be used that is formed by mixing a cerium ammoniumnitrate, perchloric acid, and water at a rate of 17:4:70.

After this, as shown in FIGS. 6 and 5F, the first transparent conductivelayer 52 a is etched, using the patterned first photosensitive layer 56a and first covering conductive layer 54 a as a mask, and the secondtransparent conductive layer 52 b is etched, using the patterned secondphotosensitive layer 56 b and second covering conductive layer 54 b as amask (step S6). For example, if ferric chloride is used as an etchingsolution, the first transparent conductive layer 52 a formed from ITOhas substantially the same pattern as formed on the first photosensitivelayer 56 a and the first covering conductive layer 54 a, and the secondtransparent conductive layer 52 b formed from ITO has substantially thesame pattern as formed on the second photosensitive layer 56 b and thesecond covering conductive layer 54 b. In other words, the firsttransparent conductive layer 52 a and the second transparent conductivelayer 52 b are etched at the same time on both surfaces of each.

After this, as shown in FIGS. 6 and 5G, the first photosensitive layer56 a left on the patterned first covering conductive layer 54 a, and thesecond photosensitive layer 56 b left on the patterned second coveringconductive layer 54 b are removed in step S7. Using an alkaline solutionsuch as 2% potassium hydroxide removes the remaining firstphotosensitive layer 56 a, thus exposing the patterned first coveringconductive layer 54 a. The above also removes the remaining secondphotosensitive layer 56 b, thus exposing the patterned second coveringconductive layer 54 b.

Next as shown in FIGS. 6 and 5H, a third photosensitive layer 56 c isformed as yet another photosensitive layer over the patterned firstcovering conductive layer 54 a, and a fourth photosensitive layer 56 dis formed as another photosensitive layer at the patterned secondcovering conductive layer 54 b (step S8). In the illustrated example,the third photosensitive layer 56 c is formed in such a form as to coverthe work-in-progress touchscreen panel sensor 30 (laminate 50) from onedirection, and the fourth photosensitive layer 56 d is formed in such aform as to cover the work-in-progress touchscreen panel sensor 30(laminate 50) from another direction. The third photosensitive layer 56c and the fourth photosensitive layer 56 d, as with the firstphotosensitive layer 56 a and the second photosensitive layer 56 b, havea photosensitive property with respect to light of a specific wavelengthregion, for example, ultraviolet radiation. Additionally, the thirdphotosensitive layer 56 c and the fourth photosensitive layer 56 d, aswith the first photosensitive layer 56 a and the second photosensitivelayer 56 b, can each be formed by coating the surface of the laminate 50with a photosensitive material using a coater.

After that, as shown in FIGS. 6 and 5I, the third photosensitive layer56 c and the fourth photosensitive layer 56 d are exposed to the lightat the same time (step S9).

In step S9, first, as shown in sectional view (a) of FIG. 5I, a thirdmask 58 c is placed over the third photosensitive layer 56 c and afourth mask 58 d is placed under the fourth photosensitive layer 56 d.The third mask 58 c has a predetermined pattern corresponding to aportion of the first covering conductive layer 54 a that is to beremoved to form the first lead-out conductor 43, and the third mask 58 chas a predetermined pattern corresponding to a portion of the secondcovering conductive layer 54 b that is to be removed to form the secondlead-out conductor 48. In the illustrated example, the third mask 58 chas the pattern formed so as to match the active area Aa1, morespecifically, a light-transmitting region slightly larger than theactive area Aa1. In addition, in the illustrated example, the fourthmask 58 d has the same pattern as that of the third mask 58 c.

An alignment mark for positioning may be formed before the firstcovering conductive layer 54 a is patterned. In that case, positioningof the third mask 58 c can be performed based on this alignment markformed from the first covering conductive layer 54 a. Using this methodenables the third mask 58 c to be positioned very accurately withrespect to the patterns of the first covering conductive layer 54 a andthe first transparent conductive layer 52 a. Substantially the samemethod can be adopted for positioning the fourth mask 58 d. Thus, thefourth mask 58 d can be positioned very accurately with respect to thepatterns of the second covering conductive layer 54 b and the secondtransparent conductive layer 52 b.

Next as shown in sectional view (a) of FIG. 5I, after the third mask 58c and the fourth mask 58 d have been disposed, the photosensitive layers56 c, 56 d are irradiated with the exposure light (e.g., ultravioletlight) that matches photosensitive characteristics of the thirdphotosensitive layer 56 c and the fourth photosensitive layer 56 d, viathe masks 58 c, 58 d. This results in the third photosensitive layer 58c and the fourth photosensitive layer 58 d being exposed to the light atthe same time in the same pattern. In the illustrated example, the firstphotosensitive layer 56 a and the second photosensitive layer 56 b areof the photo-positive type. The third mask 58 c and the fourth mask 58 dhave a light-transmitting region including the region facing the activearea Aa1. Therefore, the third photosensitive layer 56 c and the fourthphotosensitive layer 56 d are irradiated with the exposure light, in theregion facing the active area Aa1, and in a region around that region.The pattern of the light emitted from the exposure light towards thethird photosensitive layer 56 c is the same as that of the light emittedtowards the fourth photosensitive layer 56 d. The third photosensitivelayer 56 c and the fourth photosensitive layer 56 d can therefore beexposed to the light at the same time in a preplanned patternaccurately.

Next, as shown in FIGS. 6 and 5J, the exposed third photosensitive layer56 c and fourth photosensitive layer 56 d undergo development in stepS10. More specifically, a developing solution matching the thirdphotosensitive layer 56 c and the fourth photosensitive layer 56 d isprepared and then this developer is used to develop the thirdphotosensitive layer 56 c and the fourth photosensitive layer 56 d. Thusas shown in FIG. 53, the portions that have been irradiated with theexposure light without being blocked by the third mask 58 c and thefourth mask 58 d are removed from the third photosensitive layer 56 cand the fourth photosensitive layer 56 d. That is, of the thirdphotosensitive layer 56 c and the fourth photosensitive layer 56 d, theregion facing the active area Aa1, and the region around that region areremoved, and the third photosensitive layer 56 c and the fourthphotosensitive layer 56 d remain only in a region facing the non-activearea Aa2.

After this, as shown in FIGS. 6 and 5K, etching is performed for thefirst covering conductive layer 54 a that has been patterned, using thepatterned third photosensitive layer 56 c as a mask, and for the secondcovering conductive layer 54 b that has been patterned, using thepatterned fourth photosensitive layer 56 d as a mask (step S11). Theetching solution used in this step has an erosive property with respectto the covering conductive layers 54 a, 54 b, and yet exhibits noerosive property with respect to the transparent conductive layers 52 a,52 b, or the etching solution may have a weak erosive property withrespect to the transparent conductive layers 52 a, 52 b. Such an etchingsolution protects the pattern of the transparent conductive layers 52 a,52 b exposed as a result of removing the covering conductive layers 54a, 54 b. Briefly, the etching solution used in step S11 is selected sothat desired layers (the covering conductive layers 54 a, 54 b) can beselectively etched. In a more specific example, such an etching solutionas the above-mentioned phosphoric-nitric-acetic acid aqueous solution orcontaining cerium nitrate, is suitably used in step S11 since, althoughthe etching solution has an etching property against the coveringconductive layers 54 a, 54 b formed from a predetermined metal, theetching solution has no etching property against the transparentconductive layers 52 a, 52 b formed from ITO or the like.

At least the portion of the patterned first covering conductive layer 54a that is disposed at a position facing the active area Aa1 is removedby etching in step S11, and at least the portion of the patterned secondcovering conductive layer 54 b that is disposed at a position facing theactive area Aa1 is likewise removed by etching in step S11. Thus asshown in top view (b) of FIG. 5K, only the base film 32 and thetransparent conductive layers 52 a, 52 b remain on the active area Aa1.Accordingly, the active area Aa1 comes to have a light-transmittingproperty over the entire area.

In this way, the portion of the first covering conductive layer 54 athat is not covered by the third photosensitive layer 56 c is removedand hence the first transparent conductive layer 52 a becomes exposed.The exposed first transparent conductive layer 52 a is positioned in aregion facing the active area Aa1, and around that region. The firsttransparent conductive layer 52 a positioned in the region facing theactive area Aa1 has a predetermined pattern and forms the first sensorportion 41 of the first transparent electrical conductor 40. The firsttransparent conductive layer 52 a exposed at the non-active area Aa2 hasa predetermined pattern and forms part of the first sensor portion 42 ofthe first transparent electrical conductor 40.

Likewise, the portion of the second covering conductive layer 54 b thatis not covered by the fourth photosensitive layer 56 d is removed andhence the second transparent conductive layer 52 b becomes exposed. Theexposed second transparent conductive layer 52 b is positioned in aregion facing the active area Aa1, and around that region. The secondtransparent conductive layer 52 b positioned in a region facing theactive area Aa1 has a predetermined pattern and forms the second sensorportion 46 of the second transparent electrical conductor 45. The secondtransparent conductive layer 52 b exposed at the non-active area Aa2 hasa predetermined pattern and forms part of the second sensor portion 47of the second transparent electrical conductor 45.

Next as shown in FIGS. 6 and 5L, the third photosensitive layer 56 cleft on the patterned first covering conductive layer 54 a, and thefourth photosensitive layer 56 d left on the patterned second coveringconductive layer 54 b are removed in step S12. The remaining thirdphotosensitive layer 56 c is removed by using the foregoing alkalinesolution, thus exposing the patterned first covering conductive layer 54a. The above also removes the remaining fourth photosensitive layer 56d, thus exposing the patterned second covering conductive layer 54 b.

The exposed first covering conductive layer 54 a has a predeterminedpattern and forms the first lead-out conductor 43. The first terminalportion 42 of the first transparent electrical conductor 40 includingthe first transparent conductive layer 52 a is formed between the formedfirst lead-out conductor 43 and the base film 32. As described above andas shown in FIG. 3B, the thus-formed first lead-out conductor 43 ispositioned on the first terminal portion 42 spacedly from the base film32. Thus, the first terminal portion 42 is exposed in a lateraldirection between the first lead-out conductor 43 and the base film 32.

Likewise, the exposed second covering conductive layer 54 b has apredetermined pattern and forms the second lead-out conductor 48. Thesecond terminal portion 47 of the second transparent electricalconductor 45 including the second transparent conductive layer 52 b isformed between the formed second lead-out conductor 48 and the base film32. The thus-formed second lead-out conductor 48 is positioned on thesecond terminal portion 47 spacedly from the base film 32. Thus, thesecond terminal portion 47 is exposed in a lateral direction between thesecond lead-out conductor 48 and the base film 32. That is, alignmentmarks and product information in the present embodiment, as with thelead-out conductors 43, 48, are formed on a two-layer film obtained bylaminating the transparent conductive layers 52 a, 52 b and the coveringconductive layers 54 a, 54 b on the respective surfaces 32 a, 32 b ofthe base film 32. Additionally, the alignment marks and productinformation in the present embodiment, as with the lead-out conductors43, 48, can be formed on both surfaces 32 a and 32 b of the base film32. The product information includes at least one of a product name, alot number, a manufacturing date, and product grade, thus enablingconfirmation of the product information after individual-piece cuttingand mounting in the touchscreen panel device. Furthermore,machine-readable information such as bar codes is formed, which in turnenables product management/control during post-processing such asmounting in the touchscreen panel device.

An embodiment of a touchscreen panel sensor film having the alignmentmarks and product information according to the present invention isshown in FIGS. 14, 15, 16. As shown in FIGS. 14, 15, 16, the alignmentmarks 71, 73, 74, 76, 77 and the product information including productinformation 78 and a bar code 79 are formed in the non-active area Aa2(see FIGS. 1 and 3A) other than the active area Aa1 on which a contactposition (or approach position) of the touchscreen panel sensor film canbe detected. FIG. 14 is a schematic view of the touchscreen panel sensorfilm 70 formed on a web. Alignment marks 71 for sheet cutting apredetermined number of sets of unit patterns formed by step-and-repeatimposition are formed on the sensor film. The unit patterns here areeach for forming an independent, touchscreen panel sensor piece 75 shownin FIG. 16. The predetermined number of sets of unit patterns formed bystep-and-repeat imposition are each for cutting any one of the sets ofunit patterns out from the web on which the touchscreen panel sensorshown in FIG. 15 is formed. FIG. 15 shows the predetermined number ofsets of unit patterns formed by step-and-repeat imposition, each setbeing formed in a format of five lines, five columns. FIG. 15 is aschematic view of a touchscreen panel sensor film sheet 72 obtainedafter sheet cutting of the sensor film for the touchscreen panel sensoraccording to the present invention. Alignment marks 73, 74 forindividual-piece cutting or creating precut individual pieces are formedon the sheet. FIG. 16 shows a touchscreen panel sensor unit pattern(touchscreen panel sensor piece) 75 fabricated on the sensor film forthe touchscreen panel sensor according to the present invention.Alignment marks 76 for position matching to the touchscreen paneldevice, alignment marks 77 for FPC attaching, and product informationthat includes product information 78 and a bar code 79, are formed inthe unit pattern. Shapes and positions of the alignment marks 71, 73,74, 76, 77 are not limited to the shapes and positions shown in thefigures, and actual shapes and positions of these alignment marks caneach be any shape and position, provided that they enable positionmatching. The product information including the bar code can be of anyform of information, such as a two-dimensional bar code or othermachine-readable information. The alignment marks 71, 73, 74, 76, 77 andthe product information 78, 79 are formed in the same step as used forthe lead-out conductors 43, 48. The alignment marks 71 for sheetcutting, the alignment marks for creating precut sensor pieces 75, thealignment marks 73, 74 for punching-through, the alignment marks 77 forFPC attaching, or the alignment marks 76 for position matching to thesensor device can be fabricated while the positions of these kinds ofalignment marks relative to the sensor portions and the electrical linesare being kept undisturbed. Referring to the product information, itsrelationship in position is particularly important when the informationis read by a machine, and the product information can be created whilethe position of the product information in the sensor piece is being setvery accurately.

The touchscreen panel sensor 30 of the foregoing construction with thealignment marks 71, 73, 74, 76, 77 or the product information 78, 79,can be obtained in the above manner. The alignment marks 71, 73, 74, 76,77 are formed for predetermined respective purposes, which include sheetcutting, individual-piece cutting, individual-piece punching-through,FPC attaching, and position matching to the display panel. Thesheet-cutting alignment marks here refer to alignment marks for matchingpositions when a unit pattern set 72 (see FIG. 15) that is one of thepredetermined number of sets of unit patterns formed by step-and-repeatimposition is to be cut for extraction from the touchscreen panel sensorfilm 70 (see FIG. 14) formed on the web. The alignment marks forcreating precut sensor pieces 75 and for individual-piecepunching-through refer to those used to match positions when thetouchscreen panel sensor piece 75 is to be cut or punched through forextraction from the unit pattern set 72 (see FIG. 15), of thepredetermined number of sets of unit patterns formed by step-and-repeatimposition. The alignment marks for FPC attaching refer to those used tomatch positions when an end of the lead-out lines, that is closer tothat of an FPC substrate, is to be connected to the substrate. Thealignment marks for position matching to the display panel refer tothose used to match positions when the touchscreen panel sensor piece 75is to be disposed on or attached to the display surface of the displaydevice. Each kind of alignment mark may be formed so as to fulfill onepurpose of use. For example, each kind of alignment mark can be formedso as to fulfill one purpose as a special kind for sheet cutting, as aspecial kind for individual-piece cutting, or as a special kind for FPCattaching. For further reduction in the surface area of the non-activearea of the sensor film, one kind of alignment mark may be formed so asto fulfill a plurality of purposes (i.e., for at least two purposes).For example, the alignment marks 74 for individual-piece cutting, andthe alignment marks 76 for position matching to the display panel may beused in common. Alternately, one of the alignment marks 77 for FPCattaching, and one of the alignment marks 76 for position matching tothe display panel may be shared for one purpose. An alignment mark forone of the above-described several purposes, and an alignment mark for aplurality of purposes (at least two purposes) can also be formed.

The alignment marks 71, 73, 74, 76, 77 or product information 78, 79 inthe present invention can be created in the same steps as those offorming the covering conductive layers, without providing a new step.Accordingly, the creation of the alignment marks 71, 73, 74, 76, 77 orproduct information 78, 79 in the present invention makes the alignmentmarks 71, 73, 74, 76, 77 or the product information 78, 79 exactlyfollow the pattern for exposing the photosensitive layers to light, thusthe positions of the alignment marks or product information relative tothe touchscreen panel sensor region are kept uniform, and the requiredposition accuracy can be obtained.

Such improvement of the alignment marks 71, 73, 74, 76, 77 and productinformation 78, 79 in position accuracy leads to improvement ofprocessing accuracy in the post-processing steps such as sheet cutting,individual-piece cutting, individual-piece punching-through, and FPCattaching, and hence to improvement of machine-reading accuracy of theproduct information 78, 79, especially the bar code information 79.

Since the alignment marks 71, 73, 74, 76, 77 or product information 78,79 in the present invention is created in the same steps as those offorming the covering conductive layers, the position accuracy of thealignment marks or product information is substantially of the samelevel as an accuracy level of the mask patterns for exposing thephotosensitive layers to light. If the alignment marks 71, 73, 74, 76,77 are created using the screen-printing process discussed earlierherein, this makes it difficult to obtain sufficient positioningaccuracy of the alignment marks. The reason for this is that expansionand contraction of a printing plate used for screen printing are likelyto reduce the accuracy of the alignment marks (at least severalmicrometers) and accuracy of line width (several micrometers to severaltens of micrometers), and to limit maximum achievable line thickness tonearly 30 micrometers. In addition, maximum accuracy obtainable by filmedge position matching that uses no alignment marks is severalmicrometers.

If a web-like material taken up onto a roll is provided as a sourcematerial for either the base film 32, or the laminate 50, or anintermediate laminate (or the like) including the base film 32 and thefirst and second transparent conductive layers 52 a, 52 b, the web-likesource material may be unwound and delivered from the roll and each stepdescribed above may be conducted upon the delivered source material. Inthis case, a large number of touchscreen panel sensors 30 will be formedin a state of interconnection via the base film 32. The thus-fabricatedweb-like touchscreen panel sensors 30 may then be each taken up onto aroll, with a protective slip sheet or interleaf placed between every twooverlaps of the panel sensor to provide convenience/use in handling(transport, shipping, and the like). The touchscreen panel sensor 30will, as required, be delivered from the roll, while at the same time,being cuttable into sheet form.

When the web-like touchscreen panel sensor 30 is to be taken up onto aroll, slip sheets or interleaves may be placed on both sides of theweb-like touchscreen panel sensor 30. Alternatively, a slip sheet or aninterleaf may be placed only on one side of the web-like touchscreenpanel sensor 30.

In the manufacturing method described above, the first photosensitivelayer 56 a and the second photosensitive layer 56 b are both exposed tolight at the same time. In this double-side simultaneous exposureprocess, as shown in sectional view (a) of FIG. 5C, the first mask 58 aand the second mask 58 b can be positioned very accurately on the orderof, for example, micrometers, and very easily (hence, rapidly), withrespect to each other by providing the alignment mark 59 a on each ofthe first mask 58 a and the second mask 58 b. This results in both ofthe first transparent electrical conductor 40 and second transparentelectrical conductor 45 in the touchscreen panel sensor 30 becomingpositioned very accurately and efficiently on the base film 32.

Meanwhile, independent, in case the first photosensitive layer 56 a andthe second photosensitive layer 56 b are exposed to light sequentially,it does not allow accurate, easy fabrication of the first transparentelectrical conductor 40 and the second transparent electrical conductor45. To fabricate both of the first transparent electrical conductor 40and the second transparent electrical conductor 45 accurately, it isnecessary to form one of the first and second transparent electricalconductors 40, 45, together with alignment marks, on the base film 32,and then position the mask used to form the other of the first andtransparent electrical conductors 40, 45, with respect to the alignmentmark formed on the base film 32. This means that at least the exposurestep and the developing step need to be executed independently for thefirst photosensitive layer 56 a and the second photosensitive layer 56b. The first transparent electrical conductor 40 and the secondtransparent electrical conductor 45, therefore, cannot be formedefficiently, rapidly, or easily.

The first transparent electrical conductor 40 and the second transparentelectrical conductor 45 can be exposed to light while, for example,positioning the first mask 58 a and the second mask 58 b using an end ofthe base film 32 as a reference, instead of using alignment marks. Inthis method, the exposure step and the developing step can besimultaneously executed for the first photosensitive layer 56 a and thesecond photosensitive layer 56 b. Positioning accuracy of the firsttransparent electrical conductor 40 and the second transparentelectrical conductor 45, however, will depend upon profile accuracy ofthe base film 32. In general, the positioning accuracy of the first andsecond transparent electrical conductors 40, 45, obtainable by usingthis method, is on the order of several tens of micrometers at most.

For these reasons, the manufacturing method of the present embodimentthat has been described above enables the first transparent electricalconductor 40 and the second transparent electrical conductor 45 to bepositioned both easily and accurately with respect to each other. Morespecifically, in accordance with the present embodiment, in top view ofthe touchscreen panel sensor 30, that is, when the touchscreen panelsensor 30 is observed from its normal-line direction, a gap G (alsocalled a pattern gap, refer to FIG. 3A) of mutually parallel outerprofiles between the nearly square-shaped, bulged portion 41 b of thefirst sensor portion 41 and the nearly square-shaped, bulged portion 46b of the second sensor portion 46, is stably controlled below 100 μm. Ina conventional method for attaching two sheets of film together, on theother hand, the pattern gap G is as great as 200 μm or more. As aresult, in the present embodiment, a relative rate of the region inwhich one of the first sensor portion 41 and the second sensor portion46 is disposed when the touchscreen panel sensor 30 is observed from thenormal-line direction, is increased to at least 95% of all regions ofthe active area Aa1 on which the contact position (or approach position)of the touchscreen panel sensor film can be detected.

In addition, the lead-out lines 37 b include highly conductive lead-outconductors 43, 48 in addition to the terminal portions 42, 47 of thetransparent electrical conductors 40, 45 of lower conductivity. Thisenables the line width of the lead-out lines 37 b to be reduced and thusthe arrangement space for the lead-out lines 37 b, that is, the surfacearea of the non-active area Aa2, to be reduced.

In particular, in the above-described method, the lead-out conductors43, 48 are only arranged on the terminal portions 42, 47 of thetransparent electrical conductors 40, 45 and do not extend laterallybeyond the terminal portions 42, 47 of the transparent electricalconductors 40, 45, as shown in FIG. 3B, and this can be implementedwithout special positioning. On the other hand, if the lead-outconductors 43, 48 of a highly conductive material are formed on theterminal portions 42, 47 of the transparent electrical conductors 40, 45by, for example, screen printing that has traditionally been used veryfrequently, the transparent electrical conductors 40, 45 extend fromlateral sides of the terminal portions 42, 47 to an upper surface of thebase film 32, as shown in FIG. 11. Compared with these lead-out lines inthe conventional technology, if the lead-out lines 37 b in the presentembodiment are formed using the same quantity of highly conductivematerial, the lead-out lines 37 b are significantly narrowed down inline width while maintaining conductivity thereof at the same level.

In addition, the lead-out conductors 43, 48, as well as the terminalportions 42, 47 of the transparent electrical conductors 40, 45, in thepresent embodiment are formed by photolithography and can thus be formedto a desired shape at desired positions very accurately in comparisonwith those formed using the conventional method such as screen printing.Furthermore, in accordance with the present embodiment, unlike theconventional lead-out line shown in FIG. 11, the lead-out conductors 43,48 of high conductivity are not arranged laterally over the terminalportions 42, 47 of the transparent electrical conductors 40, 45 and donot extend to the upper surface of the base film 32, so electromigrationis less likely to happen. These characteristics enable significantreduction in the arrangement pitch of the lead-out lines 37 b. Hence,the arrangement space for the lead-out lines 37 b, that is, the surfacearea of the non-active area Aa2 can be reduced.

The manufacturing method of the present embodiment that has beendescribed above makes it possible to prevent the terminal portions 42,47 of the transparent electrical conductors 40, 45 from being coveredfrom the respective lateral sides by the lead-out conductors 43, 48. Inaddition, the manufacturing method of the present embodiment makes itpossible, as shown in FIG. 3B, to narrow the width of the lead-outconductors 43, 48 in comparison with that of the terminal portions 42,47 of the transparent electrical conductors 40, 45, covered by thelead-out conductors 43, 48. That is, the lead-out conductors 43, 48 canbe arranged only on the transparent electrical conductors 40, 45 whenthe lead-out conductors 43, 48 are observed from the normal-linedirection of the film surface of the base film 32. In other words, thelead-out conductors 43, 48 can be arranged only in the region where theterminal portions 42, 47 of the transparent electrical conductors 40, 45are arranged. In this construction, electrical continuity between thesensor electrode 37 a and detection controller 25 is ensured morestably. Additionally, since electromigration is less likely to happen,the arrangement pitch of the lead-out lines 37 b can be further reducedfor even smaller surface area of the non-active area Aa2.

Next, it will be described why and how the width of the lead-outconductors 43, 48 of the lead-out lines 37 b is estimated to narrow downrelative to the width of the terminal portions 42, 47 of the transparentelectrical conductors 40, 45, covered by the lead-out conductors 43, 48,when the lead-out lines 37 b are formed using the inventivemanufacturing method, referring primarily to FIG. 7. This mechanism,however, does not limit the present invention.

In the conventional method of fabricating the touchscreen panel sensorby attaching two sheets of film together, when terminal portions oftransparent electrical conductors are formed on the films byphotolithography, photosensitive layers will be arranged directly ontransparent conductive layers that form the transparent electricalconductors. In accordance with the present embodiment, on the otherhand, the covering conductive layers 54 a, 54 b are arranged on thetransparent conductive layers 52 a, 52 b that form the transparentelectrical conductors 40, 45. In general, photosensitive layers (resistlayers) have a strong erosive property with respect to an etchingsolution (e.g., ferric chloride) used to etch transparent conductivelayers. The covering conductive layers 54 a, 54 b formed from a metal orthe like can be etched with a special etching solution for thetransparent conductive layers 52 a, 52 b formed from ITO or the like.

As shown in FIG. 7, therefore, in step S6 of etching the transparentconductive layers 52 a, 52 b, when the transparent conductive layers 52a, 52 b are etched in a longitudinal direction (the normal-linedirection of the base film 32), the covering conductive layers 54 a, 54b may be etched in a transverse direction (along the sheet surface ofthe base film 32) from lateral faces not covered by the photosensitivelayers 56 a, 56 b. At the same time, since the photosensitive layershave a strong erosive property with respect to the etching solution usedin step S6, the photosensitive layers are not etched widely in atransverse direction. For these reasons, in the touchscreen panel sensor30 fabricated using the manufacturing method of the present embodiment,the width of the lead-out conductors 43, 48 can be narrowed downrelative to the width of the terminal portions 42, 47 of the transparentelectrical conductors 40, 45, covered by the lead-out conductors 43, 48.

Furthermore, the lead-out conductors 43, 48 are fabricated from thelight-shielding layers (covering conductive layers) 54 a, 54 b used toprevent the exposure light patterns of the first photosensitive layer 56a and second photosensitive layer 56 b from influencing each other whenthe first photosensitive layer 52 a and the second photosensitive layer52 b are simultaneously exposed to light in different patterns.Alignment marks or product information is also created at the same timein the same step as that of the light-shielding layers (coveringconductive layers) 54 a, 54 b. Material costs required for thefabrication of the touchscreen panel sensor 30 can be reduced by usingsuch a method. Moreover, fabrication efficiency of the touchscreen panelsensor 30 can be effectively improved, which in turn further reduces thetouchscreen panel sensor 30 in fabrication costs. Consequently, theexcellent touchscreen panel sensor 30 (touchscreen panel device 20) canbe fabricated with high production efficiency and at low manufacturingcosts.

The touchscreen panel sensor 30 that has been obtained in the above wayis bonded onto the display device 15 via the adhesive layer 19, and theprotective cover 12 is bonded onto the touchscreen panel sensor 30 viathe adhesive layer 14. The input/output device 10 shown in FIGS. 1 and 2is thus obtained. Next, operation of the input/output device 10 existingwhen it is used will be described.

First, the input/output device 10 allows the observer to observe animage via the protective cover 12 and the touchscreen panel sensor 30 bydisplaying the image on the display panel 16 of the display device 15.

In addition, in the input/output device 10, the touchscreen panel sensor30 and the protective cover 12 constitute a part of the touchscreenpanel device 20. Thus, the contact (approach) of the external conductor5 (typically, the human finger 5) on the protective cover 12, and thecontact (approach) position of the external conductor 5 on theprotective cover 12 can be detected.

More specifically, first upon the external conductor (e.g., the humanfinger) 5 touching the protective cover 12, the external conductor 5 andthe conductors 41, 46, of the electrode regions 40, 45 positioned nearthe contact position of the external conductor 5 with respect to theprotective cover 12 function as electrodes to form an electric field. Atthis time, in addition to the protective cover 12 positioned between thesensor portions 41, 46 of the transparent electrical conductors 40, 45that constitute the sensor electrodes 37 a, the base film 32 and thelike function as a dielectric. This means that the contact of theexternal conductor 5 with the protective cover 12 forms a capacitorusing the sensor portions 41, 46 and the external conductor 5 aselectrodes.

The detection circuit of the detection controller 25 in the touchscreenpanel device 20 is connected to the sensor portions 41, 46 and composedto detect capacitance existing between the sensor portions 41, 46 andthe external conductor 5. By detecting a change in the capacitancebetween the sensor portions 41, 46 and the external conductor 5, thedetection controller 25 identifies which of the first sensor portions 41the external conductor 5 faces and which of the second sensor portions46 the external conductor 5 faces.

That is, by identifying the first sensor portion (linear conductor)facing the external conductor 5, of the first sensor portions 41 in thefirst transparent electrical conductor 40 that are linearly arrayed inthe foregoing direction on the active area Aa1, the detection circuit ofthe detection controller 25 identifies a position of the externalconductor 5 on a coordinate axis extending in the foregoing direction.Similarly, by identifying the second sensor portion (linear conductor)facing the external conductor 5, of the second sensor portions 46 in thesecond transparent electrical conductor 45 that are linearly arrayed inthe other direction on the active area Aa1, the detection circuit of thedetection controller 25 identifies a position of the external conductor5 on a coordinate axis extending in the other direction. Since thecontact position of the external conductor 5 relative to that of thetouchscreen panel device 20 (protective cover 12) is thus detected inthe two different directions, position coordinates of the externalconductor 5 in contact with the surface of the touchscreen panel device20 are accurately identified on the surface of touchscreen panel device20. Various documents disclose a variety of methods (principles) ofdetecting a contact position in touchscreen panels of the projected-typecapacitive-coupling scheme, and further detailed description of thesemethods (principles) is omitted herein.

In the touchscreen panel sensor 30 fabricated using the manufacturingmethod according to the present embodiment, each sensor electrode 37 aand lead-out line 37 b are formed on both sides of the base film 32existing as a single entity. That is, a bonded structure or the likeincluding a plurality of films bonded via an adhesive agent or the likeis not used as a base film. The result is that the touchscreen panelsensor 30 on the whole improves in light-transmitting coefficient. Thenumber of interfaces capable of reflecting illumination or otherenvironmental light (external light), image light, and other light, isalso reduced, which in turn suppresses the reflection of theenvironmental light and improves contrast of the image displayed on thedisplay device 15. In addition, these characteristics prevent thedisplay image of the display device 15 from significantly deterioratingwhen the touchscreen panel sensor 30 is disposed on the display surface16 of the display device 15. Furthermore, the above reduces overallthickness of the touchscreen panel sensor 30 and the input/output device10.

The highly accurate positioning of the alignment marks 71, 73, 74, 76,77 or product information 78, 79 according to the present embodimentimproves processing accuracy in the post-processing steps such as sheetcutting, individual-piece cutting, individual-piece punching-through,and FPC attaching, and hence improves machine-reading accuracy of theproduct information 78, 79, particularly of the bar code information 79.

Additionally, as shown in FIG. 2, the first sensor portions 41 of thefirst transparent electrical conductor 40 and second sensor portions 46of the second transparent electrical conductor 45 constitute the sensorelectrodes 37 a, and the first and second portions 41, 46 are arrangedat different positions along the normal-line direction of thetouchscreen panel sensor 30 (protective cover 12). More specifically,the second sensor portions 46 of the second transparent electricalconductor 45 are arranged at positions spaced for the thickness of thebase film 32 from the protective cover 12, relative to the first sensorportions 41 of the first transparent electrical conductor 40. However,as described above, the base film 32 in the present embodiment isconstructed as a film of a single entity. Additionally, the base film32, as opposed to the base film disclosed in Patent Document 2 (JP1992-264613A), is not required to have a special function such asshielding far-ultraviolet light. Briefly, the base film 32 isconstructible from a thin film of a single entity. When the externalconductor 5 comes into contact with the protective cover 12, therefore,a capacitor can be stably formed between the external conductor 5 andthe second sensor portions 46 of the second transparent electricalconductor 45. Thus, the contact position (touch position) of theexternal conductor 5 with respect to the protective cover 12 can bedetected accurately with extremely high sensitivity via not only thefirst sensor portions 41 of the first transparent electrical conductor40, but also the second sensor portions 46 of the second transparentelectrical conductor 45.

In addition, in accordance with the present embodiment, as shown inFIGS. 3A and 3B, the first sensor portions 41 of the first transparentelectrical conductor 40 each have a linear portion 41 a and a bulgedportion 41 b, and the second sensor portions 46 of the secondtransparent electrical conductor 45 each have a linear portion 46 a anda bulged portion 46 b. In the sensor portions 41, 46, width of each ofthe bulged portions 41 b, 46 b is very great, compared with that of eachof the linear portions 41 a, 46 a. As described above, the bulgedportion 41 b of the first sensor portion 41, included in the firsttransparent electrical conductor 40, and the bulged portion 46 b of thesecond sensor portion 46, included in the second transparent electricalconductor 45, are arranged so as not to overlap when observed from thenormal-line direction of the film surface of the base film 32. Thisprevents the first sensor portion 41 of the first transparent electricalconductor 40 from intervening between the external conductor 5 and thesecond sensor portion 46 of the second transparent electrical conductor45, in a surface area too wide to be likely to influence detectionaccuracy of the contact position. This arrangement, in turn, preventsthe capacitor from failing to be effectively formed between the externalconductor 5 and the second sensor portion 46 of the second transparentelectrical conductor 45.

Furthermore, as described above, the display controller 17 of thedisplay device 15 and the detection controller 25 of the touchscreenpanel device 20 are connected to each other. The detection controller 25transmits, to the display controller 17, information that will be inputwhen the external conductor 5 touches a predetermined position on theprotective cover 12. Based on the input information read by thedetection controller 25, the display controller 17 can display anappropriate image according to the input information, on the displaypanel 16 of the display device 15. In other words, a display function asoutput means, and a touch position detection function as input meansallow direct exchanging of information in an interactive format betweenthe input/output device 10 and a user (operator) thereof. For example,the above allow the user to assign instructions to the display device 10and the display device 10 to execute the instructions.

As described above, when the first transparent electrical conductor 40and the second transparent electrical conductor 45 are patterned on thebase film 32 through double-side simultaneous exposure process step S3for the photosensitive layers 56 a, 56 b, the first and second sensorportions 41, 46 that constitute the sensor electrodes 37 a arepositioned accurately with respect to each other. Consequently, eachfirst sensor portion 41 of the first transparent electrical conductor 40and each second sensor portion 46 of the second transparent electricalconductor 45 are both positioned accurately with respect to the displaydevice 15. In this case, the contact position of the external conductor5 with respect to the protective cover 12 is detected accurately withthe display device 15 as a reference. The result is that the inputappropriate for the image information displayed on the display device 15is detected at high resolution and very accurately, whereby theinteractive information exchange between the input/output device 10 andthe user (operator) thereof makes very smooth progress.

In accordance with the present embodiment as described above, thecovering conductive layers 54 a, 54 b disposed on and patterned with thetransparent conductive layers 52 a, 52 b are used as part of thelead-out lines 37 b. More specifically, the lead-out conductors 43, 48is formed from the covering conductive layers 54 a, 54 b each patternedto have the same pattern as that of the transparent conductive layers 52a, 52 b and then each having a portion of the covering conductive layerremoved. The lead-out conductors 43, 48 form the lead-out lines 37 b byworking together with the transparent electrical conductors 40, 45formed from the patterned transparent conductive layers 52 a, 52 b.

The lead-out lines 37 b that have been fabricated using this methodensure high electrical conductivity via the lead-out conductors 43, 48.In addition, unlike the conventional lead-out line (see FIG. 11)fabricated by screen printing or the like, the lead-out conductors 43,48 are arranged on the transparent conductive layers 52 a, 52 b and donot extend to lateral portions thereof. This significantly reduces theline width of the lead-out lines 37 b. Furthermore, in the aboveembodiment, as opposed to the conventional fabrication method such asscreen printing, the lead-out conductors 43, 48 are formed usingphotolithography, so that the lead-out lines 37 b of the desired patternare fabricated stably and with high accuracy. Thus, electromigration isless likely to happen. For these reasons, in the present embodiment, thelead-out lines 37 b can be formed side by side at short pitches, andthese characteristics enable significant reduction in the surface arearequired for the arrangement of the lead-out lines 37 b, that is, thesurface area of the non-active area Aa2.

The lead-out conductors 43, 48 are out of contact with the base film 32capable of exhibiting low adhesive strength only, and are only bondedonto the transparent electrical conductors 40, 45 capable of exhibitinghigh adhesive strength. Accordingly, even if the touchscreen panelsensor 30 becomes deformed during use, the point at which the lead-outconductors 43, 48 might start peeling off from the touchscreen panelsensor 30 is made less prone to formation. In addition, the terminalportions 42, 47 of the transparent electrical conductors 40, 45 are notcovered on respective lateral faces due to the lead-out conductors 43,48 and are exposed in a lateral direction between the base film 32 andthe lead-out conductors 43, 48. Rather, restraint of the lead-outconductors 43, 48 upon deformation of the terminal portions 42, 47 isweak, and in case of the touchscreen panel sensor 30 becoming deformed,the deformation of the terminal portions 42, 47 can occur following thatof the base film 32. These factors effectively suppress peeling-off ofthe lead-out conductors 43, 48 from the transparent electricalconductors 40, 45 or the base film 32, and that of the terminal portions42, 47, along with the lead-out conductors 43, 48, from the base film32. This remarkably improves the detection function of the touchscreenpanel sensor 30.

Additionally, the covering conductive layers 54 a, 54 b used for theformation of the lead-out conductors 43, 48 are used as light-shieldinglayers in double-side simultaneous exposure step S3. Use of such afabrication method enables very effective and inexpensive fabrication ofthe touchscreen panel sensor 30 having excellent performance asdescribed above. Creating alignment marks or product information in thesame step as that of the lead-out conductors 43, 48 makes the alignmentmarks 71, 73, 74, 76, 77 or the product information 78, 79 exactlyfollow the pattern for exposing the photosensitive layers to light.Thus, the positions of the alignment marks or product informationrelative to the touchscreen panel sensor region are kept uniform, andthe position accuracy required can be obtained. The alignment marks 71for cutting the web 70 into sheets 72, the alignment marks 73, 74 forcutting or punching individual sensor pieces 75, the alignment marks 76for position matching to the sensor device, and the alignment marks 77for attaching to an FPC substrate are created while respective positionsrelative to the sensor region are being kept undisturbed. Most importantabout the product information is its relationship in position duringmachine reading, in particular, and the position of this information inone sensor piece is kept highly accurate during creation.

Various changes may be introduced in the above embodiment. An example ofits modification is described below.

In the above embodiment, there has been described an example in which aregion including both the active area Aa1 of the covering conductivelayers 54 a, 54 b and a surrounding area neighboring the active area Aa1is removed in the step of removing a portion of the patterned coveringconductive layers 54 a, 54 b. However, this example does not limit theportion removed. In perspective of removing a portion of thelight-shielding covering conductive layers 54 a, 54 b to ensuretransparency of the active area Aa1, only a region inside the activearea Aa1 may be removed. In such an example as this, the conductivity ofthe lead-out lines 37 b can be enhanced by expanding the arrangementregion of the lead-out conductors 43, 48 while ensuring transparency ofthe touchscreen panel sensor 30, at the active area Aa1. The aboveembodiment is however superior to this example in terms of renderingexposure accuracy and developing accuracy of the third and fourthphotosensitive layers 56 c, 56 d permissible to improve reliability ofthe touchscreen panel sensor 30. Naturally, if the portion of thecovering conductive layers 54 a, 54 b that is to be removed is changed,a pattern of a transmission region of the third mask 58 c and the fourthmask 58 d needs to be changed.

Additionally, in the step of developing and patterning the otherphotosensitive layers 56 c, 56 d, patterning the third and fourthphotosensitive layers 56 c, 56 d into the form of a frame or bezelregion surrounding the active area Aa1 from all four directions or sideshas been described as an example, but this example does not limit thepresent invention. For instance, both exposure (see FIG. 8A) anddevelopment (see FIG. 8B) of the third and fourth photosensitive layers56 c, 56 d may take place in a pattern corresponding to a pattern to beleft on the transparent conductive layers 52 a, 52 b (transparentelectrical conductors 40, 45). As shown in FIG. 8A, even in this exampleof modification, the covering conductive layers 54 a, 54 b having alight-shielding property block the light emitted in a predeterminedpattern from a different side of the exposure light source, therebyenabling highly accurate double-side simultaneous exposure of the thirdphotosensitive layer 56 c and the fourth photosensitive layer 56 d indifferent patterns. The above embodiment is however superior to thismodification, in terms of rendering variations in the exposure accuracyand developing accuracy of the third and fourth photosensitive layers 56c, 56 d permissible to improve reliability of the touchscreen panelsensor 30. In the modifications that FIGS. 8A and 8B show, otherconstituent elements may be constructed similarly to those of theembodiment. Referring to FIGS. 8A and 8B, elements that may beconstructed substantially the same as those of the embodiment are eachassigned the same reference number and overlapping description isomitted.

Furthermore, an example of a manufacturing method for the touchscreenpanel sensor 30 has been described in the above embodiment, but themanufacturing method is not limited to this example. For instance, thestep of annealing the transparent conductive layers 52 a, 52 b toaccelerate crystallization (microcrystallization) thereof may beprovided midway.

During film deposition by sputtering or the like, the transparentconductive layers formed from ITO or the like usually have theirdeposition temperatures controlled as appropriate, for acceleratedcrystallization. In general, the crystallization of the transparentconductive layers 52 a, 52 b included in the laminate (blanks) forfabricating the touchscreen panel sensor 30 is already accelerated andhas appropriate resistance to chemicals. At the same time, however, thecrystallization (also, called microcrystallization) of the transparentconductive layers is likewise possible by depositing these transparentconductive layers in an amorphous condition and after the deposition,annealing them at a temperature nearly of 140° C.

The step of annealing the transparent conductive layers 52 a, 52 bpreferably follows their patterning step S6, while at the same time,preceding step S11 of removing a portion of the patterned coveringconductive layers 54 a, 54 b. For example, the annealing step ispreferably executed between step S10 of developing the third and fourthphotosensitive layers 58 c, 58 d and step S11 of removing a portion ofthe patterned covering conductive layers 54 a, 54 b. For example, if thechemical resistance of the covering conductive layers 54 a, 54 b is weakand the covering conductive layers 54 a, 54 b that were patterned instep S6 of patterning the conductive layers 54 a, 54 b are likely to beetched, it is effective that the annealing step is added.

To be more specific, in step S6 of patterning the transparent conductivelayers 52 a, 52 b, amorphous transparent conductive layers 52 a, 52 b oflow chemical resistance are etched with an etching solution having aweak erosive property, for example, oxalic acid. If the etching solutionhaving a weak erosive property is used, the covering conductive layers54 a, 54 b formed from a material (e.g., silver) having a weak erosiveproperty are prevented from eroding in a transverse direction (i.e.,along the sheet surface of the base film 32) between the transparentconductive layers 52 a, 52 b and the photosensitive layers 56 a, 56 b.Accordingly, highly accurate patterning of the transparent conductivelayers 52 a, 52 b is accomplished. In addition, prior to step S11 ofremoving a portion of the covering conductive layers 54 a, 54 b,annealing the transparent conductive layers 52 a, 52 b to enhancechemical resistance effectively prevents damage of the pattern of thetransparent conductive layers 52 a, 52 b patterned to the desired shape,during the partial removal of the covering conductive layers 54 a, 54 b.

Moreover, in the above-described embodiment, there has been shown anddescribed an example in which the first covering conductive layer 54 ais formed on the first transparent conductive layer 52 a and the secondcovering conductive layer 54 b on the second transparent conductivelayer 52 b, in the laminate (blanks) 50 as the source material used formanufacturing the touchscreen panel sensor 30. However, the form ofdeposition is not limited to this example. For example, one coveringconductive layer may be formed only upon one of the first transparentconductive layer 52 a and the second transparent conductive layer 52 b.The first covering conductive layer 54 a is omitted in the examples thatsectional view (a) and top view (b) of FIG. 9 show. That is, thelaminate (blanks) 50 as the source material, includes the base film 32,the first and second transparent electrical conductor layers 52 a, 52 barranged on the base film 32, and the second covering conductive layer54 b disposed on the second transparent electrical conductor layer 52 b.Sectional view (a) and top view (b) of FIG. 9 are keyed to sectionalview (a) and top view (b) of FIG. 5C, respectively, and show step S3 ofconducting double-side simultaneous exposure upon the firstphotosensitive layer 56 a disposed on the first transparent electricalconductor layer 52 a and the second photosensitive layer 56 b disposedon the second covering conductive layer 54 b. As shown in sectional view(a) of FIG. 9, the exposure light used for exposing the firstphotosensitive layer 56 a thereto in the predetermined pattern isblocked by the second covering conductive layer 54 b and not emittedtowards the second photosensitive layer 56 b. Further, the exposurelight used for expose the second photosensitive layer 56 b thereto inthe predetermined pattern is blocked by the second covering conductivelayer 54 b and not emitted towards the first photosensitive layer 56 a.As in the embodiment, therefore, the covering conductive layers 54 a, 54b undergo highly accurate double-side simultaneous exposure in differentpatterns. Substantially the same transparent electrical conductors 40,45 and second lead-out conductors as formed in the embodiment can alsobe obtained. Since the covering conductive layer 54 b is not formed onthe first transparent conductive layer 52 a, the first lead-outconductor 43 is not formed on the first transparent electrical conductor40.

Furthermore, in the above-described embodiment, there has been shown anddescribed an example of providing the transparent conductive layers 52a, 52 b and the covering conductive layers 54 a, 54 b on each side ofthe base film 32 in the laminate (blanks) 50. However, the form oflayering is not limited to this example. The transparent conductivelayers and the covering conductive layers may be provided only on onesurface of the base film 32. In this case, the lead-out lines 37 b inthe embodiment can be obtained on one surface of the base film 32. Inthis modification, exposure light can be emitted only from one side ofthe laminate 50 in step S3 of exposing the photosensitive layers to thelight. Additionally in this modification, the covering conductive layerscan be formable from a material not having a light-shielding property.

Furthermore, in the above-described embodiment, there has been shown anddescribed an example in which the first sensor portions 41 of the firsttransparent electrical conductor 40 each include a linear portion 41 aand a bulged portion 41 b and the second sensor portions 46 of thesecond transparent electrical conductor 45 each include a linear portion46 a and a bulged portion 46 b. In addition, an example of forming thebulged portions 41 b, 46 b into a nearly square shape in plan view hasbeen shown and described in the embodiment. These examples, however, arenot restrictive and the bulged portions 41 b, 46 b in plan view may, byway of example, have a rectangular shape other than a square, such as arhombus, or even have a shape of a polygon, a circle, or the like. Inaddition, the sensor portions 41, 46 may include a linear profile,instead of including the bulged portions 41 b, 46 b.

Furthermore, in the above-described embodiment, there has been shown anddescribed an example in which the first sensor portions 41 of the firsttransparent electrical conductor 40 and the second sensor portions 46 ofthe second transparent electrical conductor 45 are constructed to havethe same geometry. However, this example is not restrictive. Forinstance, as shown in FIG. 10, the second sensor portions 46 of thesecond transparent electrical conductor 45 may have line width w₂greater than the line width w₁ of the first sensor portions 41 of thefirst transparent electrical conductor 40 closer to the protective cover12 (observer's side). In this example of modification, when the externalconductor 5 comes into contact with the protective cover 12, a capacitorcan be stably formed between the external conductor 5 and the secondsensor portions 46 of the second transparent electrical conductor 45relatively farther from the protective cover 12 (observer's side). Inaddition, the capacitance of the capacitor formed between the secondsensor portions 46 of the second transparent electrical conductor 45 andthe external conductor 5 coming into contact with the protective cover12 can be prevented from decreasing in comparison with the capacitanceof a capacitor formed between the first sensor portions 41 of the firsttransparent electrical conductor 40 and the external conductor 5 cominginto contact with the protective cover 12. This enables highly sensitiveand accurate detection of the contact position (touch position) of theexternal conductor 5 with respect to the protective cover 12, by thesecond sensor portions 46 of the second transparent electrical conductor45 as well as the first sensor portions 41 of the first transparentelectrical conductor 40. In the modification of FIG. 10, otherconstituent elements can be constructed similarly to those of theembodiment. The elements in FIG. 10 that would be constructible to havesubstantially the same geometry are each assigned the same referencenumber and overlapping description of these elements is omitted herein.

While several modifications of the embodiment have been described above,a plurality of these modifications can obviously be applied incombination as appropriate.

Second Embodiment

A second embodiment of the present invention is described belowreferring to FIGS. 12(a), 12(b) and 13. FIG. 12(a), which corresponds toFIG. 3B in the first embodiment, is a sectional view showing firstelectrical lead-out conductors provided in the second embodiment of thepresent invention, and FIG. 12(b) is a sectional view showing secondelectrical lead-out conductors provided in the second embodiment of thepresent invention. FIG. 13 is a sectional view showing a laminateprovided in the second embodiment of the present invention.

The second embodiment shown in FIGS. 12(a), 12(b), and 13 differs fromthe first embodiment only in that: each lead-out conductor includes anintermediate layer provided on a portion of a transparent electricalconductor spacedly from a base film, and a highly conductive layerprovided on the intermediate layer; the highly conductive layer isformed from a material whose conductivity is greater than that ofmaterials forming the transparent electrical conductor and theintermediate layer, and the intermediate layer is formed from a materialhaving great adhesive strength with respect to the transparentelectrical conductor; and thickness of the intermediate layer is smallerthan that of the highly conductive layer. Other structural factors aresubstantially the same as those of the first embodiment shown in FIGS. 1to 10. More specifically, surfaces 32 a and 32 b of the base film 32each have an intermediate layer 61 or 66 laminated on a transparentconductive layer 52 a or 52 b, and a covering conductive layer 63 or 68further laminated on the intermediate layer 61 or 66. A three-layer filmis thus formed. In the second embodiment that FIGS. 12(a), 12(b), and 13show, the same elements as in the first embodiment shown in FIGS. 1 to10 are each assigned the same reference number and detailed descriptionof these elements is omitted herein.

Lead-Out Conductors

As shown in FIG. 12(a), first lead-out conductors 43 in the presentembodiment each include a first intermediate layer 61 provided on aportion of a first transparent electrical conductor 40 spacedly from abase film 32, and a first highly conductive layer 63 provided on thefirst intermediate layer 61. Similarly, as shown in FIG. 12(b), secondlead-out conductors 48 each include a second intermediate layer 66provided on a portion of a second transparent electrical conductor 45spacedly from the base film 32, and a second highly conductive layer 68provided on the second intermediate layer 66. A first protective layer62 may also be provided on the first highly conductive layer 63, asshown in FIG. 12(a). Similarly, a second protective layer 67 may beprovided on the second highly conductive layer 68, as shown in FIG.12(b).

In each lead-out conductor 43, 48 in the present embodiment, each highlyconductive layer 63, 68 is formed from a material having electricalconductivity higher than those of materials forming each transparentelectrical conductor 40, 45 and each intermediate layer 61, 66. To bemore specific, the highly conductive layer 63, 68 is formed using, forexample, a material whose conductivity is much higher than that of thetransparent electrical conductor 40, 45 formed from ITO or the like. Thematerial of the highly conductive layer 63, 68 is either a metal such asaluminum, molybdenum, palladium, silver, chromium, and copper, or analloy obtained by mixing at least two kinds of these metals, forexample, a silver alloy. Of these candidates, a silver alloy has lowerspecific resistance than the chromium generally used as a wiringmaterial, and is therefore preferable as the material of the highlyconductive layer 63, 68. Examples of such a silver alloy include an APCalloy that contains silver, palladium, and copper.

Adhesive strength between the highly conductive layer 63, 68 made of asilver alloy, and the transparent electrical conductor 40, 45 formedfrom a transparent conductive material such as ITO, is roughly smallerthan the adhesive strength between chromium, which is a general wiringmaterial, and the transparent electrical conductor 40, 45. Therefore, ifthe highly conductive layer 63, 68 made of a silver alloy is provideddirectly on the transparent electrical conductor 40, 45, therefore, thismay result in a lack of adhesion between the highly conductive layer 63,68 and the transparent electrical conductor 40, 45. In this case, it isconsidered that if some kind of impact is added to the lead-outconductor 43, 48, the highly conductive layer 63, 68 may be peeled offfrom the transparent electrical conductor 40, 45. Accordingly, if thelead-out conductor 43, 48 includes the highly conductive layer 63, 68made of a silver alloy, an electrically conductive layer having acertain degree of adhesion to the transparent electrical conductor 40,45 and the highly conductive layer 63, 68 is preferably interposedbetween the transparent electrical conductor 40, 45 and the highlyconductive layer 63, 68. In the present embodiment, the intermediatelayer 61, 66 is interposed between the transparent electrical conductor40, 45 and the highly conductive layer 63, 68, and the material formingthe intermediate layer 61, 66 is selected so that the adhesive strengthbetween the intermediate layer 61, 66 and the transparent electricalconductor 40, 45 will be greater than the adhesive strength between thehighly conductive layer 63, 68 and the transparent electrical conductor40, 45. Additionally, thickness of the intermediate layer 61, 66 issmaller than that of the highly conductive layer 63, 68.

Intermediate Layers

Next, the first and second intermediate layers 61, 66 are described indetail below. Adhesive strength of the intermediate layers 61, 66 isfirst described. Adhesive strength between the first intermediate layer61 and the first transparent electrical conductor 40, and adhesivestrength between the first intermediate layer 61 and the first highlyconductive layer 63 are greater than the adhesive strength between thefirst transparent electrical conductor 40 and the first highlyconductive layer 63. Similarly, adhesive strength between the secondintermediate layer 66 and the second transparent electrical conductor45, and adhesive strength between the second intermediate layer 66 andthe second highly conductive layer 68 are greater than the adhesivestrength between the second transparent electrical conductor 45 and thesecond highly conductive layer 68.

It is noted that the “adhesive strength” is evaluated using, forexample, the pull-off method specified in Japanese Industrial StandardJIS K5600-5-7.

First, a tension tester, for example, that matches the method specifiedin JIS K5600-5-7, is provided. Next, a test plate with the intermediatelayers 61, 66 on the transparent electrical conductors 40, 45 isprepared and the adhesion (adhesive strength) existing between thetransparent electrical conductors 40, 45 and the intermediate layers 61,66 is measured using the tension tester. The adhesion that has thus beenmeasured is expressed as A.

Next, a test plate with the highly conductive layers 63, 68 on theintermediate layers 61, 66 is prepared and the adhesion (adhesivestrength) existing between the intermediate layers 61, 66 and the highlyconductive layers 63, 68 is measured using the tension tester. Theadhesion that has thus been measured is expressed as B.

Next, a test plate with the highly conductive layers 63, 68 on thetransparent electrical conductors 40, 45 is prepared and the adhesion(adhesive strength) existing between the transparent electricalconductors 40, 45 and the highly conductive layers 63, 68 is measuredusing the tension tester. The adhesion that has thus been measured isexpressed as C.

In the present embodiment, adhesion A between the transparent electricalconductors 40, 45 and the intermediate layers 61, 66, and adhesion Bbetween the intermediate layers 61, 66 and the highly conductive layers63, 68 are greater than adhesion C between the transparent electricalconductors 40, 45 and the highly conductive layers 63, 68. Thisindicates that in the present embodiment, the interposition of theintermediate layers 61, 66 between the transparent electrical conductor40, 45 and the highly conductive layer 63, 68 improves the adhesivestrength between the transparent electrical conductor 40, 45 and thehighly conductive layer 63, 68.

An electrical conducting property of the intermediate layers 61, 66 isdescribed next. In the lead-out conductors 43, 48, the highly conductivelayers 63, 68 play a main role in conducting electrical signals. Theintermediate layers 61, 66 therefore do not need to have an electricalconducting property superior to that of the highly conductive layers 63,68, and only need to have a conductivity level at which the intermediatelayers electrically connect the transparent electrical conductors 40, 45and the highly conductive layers 63, 68, at low resistance. Accordingly,specific resistance of the intermediate layers 61, 66 is higher thanthat of the highly conductive layers 63, 68. In addition, preferably,the thickness of the intermediate layers 61, 66 is smaller than that ofthe highly conductive layers 63, 68, and for example, when the highlyconductive layers 63, 68 ranges between 50 and 250 nm in thickness, theintermediate layers 61, 66 range between 3 and 8 nm in thickness. Thissmall thickness of the intermediate layers 61, 66 enables the electricalconnection between the transparent electrical conductors 40, 45 and thehighly conductive layers 63, 68, at low resistance, and reduction inthickness of the entire lead-out conductors 43, 48.

The kind of material forming the intermediate layers 61, 66 is notlimited, only if the material exhibits sufficient adhesive strength withrespect to the transparent electrical conductors 40, 45 and the highlyconductive layers 63, 68, and a metal such as a molybdenum (Mo) alloy isused as the material. This Mo alloy is, for example, MoNb, which is analloy of Mo and niobium (Nb).

Protective Layers

Next, the first protective layer 62 provided on the first highlyconductive layer 63, and second protective layer 67 provided on thesecond highly conductive layer 68 are described in detail below. Theprotective layers 62, 67, provided to prevent oxidation of the highlyconductive layers 63, 68, have acid resistance, water resistance, andthe like. The kind of material forming the protective layers 62, 67 isnot limited, only if the material has adequate resistance to acids, anda metal such as a Mo alloy is used as the material. This Mo alloy is,for example, MoNb, an alloy of Mo and niobium (Nb). Thickness of theprotective layers 62, 67 ranges between 10 and 30 nm, for example.

Laminate

The laminate 50, provided as a source material for manufacturing thetouchscreen panel sensor 30 in the second embodiment of the present, isdescribed below with reference being made to FIG. 13. The laminate 50includes a transparent base film 32, a first transparent conductivelayer 52 a laminated on one surface 32 a of the base film 32, a secondtransparent conductive layer 52 b having a light-transmitting property,laminated on the other surface 32 b of the base film 32, a firstcovering conductive layer 54 a laminated on the first transparentconductive layer 52 a, and a second covering conductive layer 54 blaminated on the second transparent conductive layer 52 b.

The covering conductive layers 54 a, 54 b may, as shown in FIG. 13,include intermediate layers 61, 66 provided on the transparentconductive layers 52 a, 52 b, highly conductive layers 63, 68 providedon the intermediate layers 61, 66, and protective layers 62, 67 providedon the highly conductive layers 63, 68. Patterning the coveringconductive layers 54 a, 54 b forms the lead-out conductors 43, 48.

FIGS. 14, 15, and 16 show how alignment marks and product informationare arranged in the present invention. As shown in FIGS. 14, 15, and 16,the alignment marks 71, 73, 74, 76, 77 and the product information thatcontains product information 78 and a bar code 79 are created in anon-active area Aa2 (see FIGS. 1 and 3A), which is outside an activearea Aa1 in which a contact position (approach position) of thetouchscreen panel sensor film can be detected. FIG. 14 is a schematicview of the touchscreen panel sensor film 70 formed on a web. Alignmentmarks 71 for sheet-cutting a predetermined number of sets of unitpatterns formed by step-and-repeat imposition are formed on the sensorfilm. The unit patterns here are each for forming the independent,touchscreen panel sensor piece 75 shown in FIG. 16. The predeterminednumber of sets of unit patterns by step-and-repeat imposition are eachfor cutting into sheet form any one of the sets of unit patterns fromthe web on which is formed the touchscreen panel sensor shown in FIG.15. FIG. 15 shows the predetermined number of sets of unit patternsformed by step-and-repeat imposition, each set being formed in a formatof five lines, five columns. FIG. 15 is a schematic view of atouchscreen panel sensor film sheet 72 obtained after sheet cutting ofthe sensor film for the touchscreen panel sensor according to thepresent embodiment. Alignment marks 73, 74 for individual-piece cuttingor for creating precut individual pieces are formed on the sheet. FIG.16 shows a unit pattern (touchscreen panel sensor piece) 75 of thetouchscreen panel sensor fabricated on the sensor film for thetouchscreen panel sensor according to the present invention. Alignmentmarks 76 for position matching to the touchscreen panel device,alignment marks 77 for FPC attaching, and product information thatincludes product information 78 and a bar code 79, are formed in theunit pattern. Shapes and positions of the alignment marks 71, 73, 74,76, 77 are not limited to the shapes and positions shown in the figures,and actual shapes and positions of these alignment marks can each be anyshape and position, only if the shape and the position are such thatposition matching can be realized. The product information including thebar code can be a two-dimensional bar code or other machine-readableinformation. The alignment marks 71, 73, 74, 76, 77 and the productinformation 78, 79 are formed in the same step as used for the lead-outconductors 43, 48. That is, the alignment marks and product informationin the second embodiment of the present invention, as with the lead-outconductors 43, 48, are formed from a three-layer film obtained by, foreach of the surfaces 32 a and 32 b of the base film 32, laminating anintermediate layer 61 or 66 on the transparent conductive layer 52 a or52 b and further laminating a covering conductive layer 63 or 68 on theintermediate layer 61 or 66. Protective layers 62, 67 may beadditionally provided on the three-layer film. Furthermore, thealignment marks and product information in the second embodiment of thepresent invention, as with the lead-out conductors 43, 48, can be formedon both surfaces 32 a and 32 b of the base film 32.

The touchscreen panel sensor 30, the alignment marks 71, 73, 74, 76, 77,and the product information 78, 79 are formed by conducting filmdeposition, patterning, and/or other processing, upon the laminate 50.In the present embodiment, if the highly conductive layers 63, 68 aremade from an APC alloy and the intermediate layers 61, 66 and theprotective layers 62, 67 are made from MoNb, the highly conductivelayers 63, 68, the intermediate layers 61, 66, and the protective layers62, 67 can be etched with the same etching solution, for example aphosphoric-nitric-acetic acid aqueous solution or the like. Hence, thecovering conductive layers 54 a, 54 b including the intermediate layers61, 66, the highly conductive layers 63, 68, and the protective layers62, 67, can be patterned using a single etching solution. Other types ofprocessing, such as film deposition and patterning, are substantiallythe same as used in the first embodiment shown in FIGS. 1 to 10, andfurther detailed description of these types of processing is thereforeomitted herein.

In this way, in accordance with the present embodiment, the alignmentmarks 71, 73, 74, 76, 77 or product information 78, 79 in the presentinvention can be created in the same steps as those of forming thecovering conductive layers 54 a, 54 b, without providing a new step.Accordingly, the alignment marks 71, 73, 74, 76, 77 or the productinformation 78, 79 is created exactly along the pattern for exposing thephotosensitive layers to light, thus the positions of the alignmentmarks or product information relative to the touchscreen panel sensorregion are kept uniform, and the required position accuracy can beobtained.

Such improvement of the alignment marks 71, 73, 74, 76, 77 and productinformation 78, 79 in position accuracy leads to improvement ofprocessing accuracy in post-processing steps such as sheet cutting,individual-piece cutting, individual-piece punching-through, FPCattaching, and position matching to a display panel, and hence toimprovement of machine-reading accuracy of the product information,especially the bar code information.

In the present embodiment, the lead-out conductors 43, 48 include theintermediate layers 61, 66 provided on portions of the transparentelectrical conductors 40, 45 spacedly from the base film 32, and thehighly conductive layers 63, 68 provided on the intermediate layers 61,66. Of these elements, the highly conductive layers 63, 68 are formedfrom a material whose electrical conductivity is higher than that of amaterial(s) forming the transparent electrical conductors 40, 45 and theintermediate layers 61, 66, such as a silver alloy, and the intermediatelayers 61, 66 are formed from a material having great adhesive strengthwith respect to the transparent electrical conductors 40, 45, such as aMoNb alloy. Accordingly, compared with a method of forming lead-outconductors using a material such as the chromium that is a generalwiring material, the above way to form the lead-out conductors 43, 48enhances the conductivity of the lead-out conductors 43, 48, providingappropriate adhesion between the lead-out conductors 43, 48 and thetransparent electrical conductors 40, 45.

In the present embodiment, the alignment marks 71, 73, 74, 76, 77 or theproduct information 78, 79 is created using the intermediate layers 61,66 provided on portions of the transparent electrical conductors 40, 45spacedly from the base film 32, and the covering conductive layers 54 a,54 b provided on the intermediate layers 61, 66. In this case, presenceof the intermediate layers 61, 66 improves adhesion, offering asignificant prevention effect against peeling-off. The prevention ofpeeling-off in processing steps is crucial since a flexible transparentfilm base is used. The peeling-off prevention effect preventspeeling-off of the layers forming the alignment marks 71, 73, 74, 76, 77or the product information 78, 79, thereby improving reliability ofproducts as well as processing accuracy of the sensor film.

Additionally, in the present embodiment, forming the protective layers62, 67 on the alignment marks 71, 73, 74, 76, 77 or on the productinformation 78, 79 leads to, for example, avoiding damage to thealignment marks 71, 73, 74, 76, 77 or the product information 78, 79during processing, and preventing oxidation of the highly conductivelayers 63, 68 after the product has been manufactured. For example, ifsilver or an alloy thereof is used for the highly conductive layers 63,68, this helps to prevent the highly conductive layers from changinginto sulfides as well as from oxidating, to stabilize reflectance, tomaintain gloss, and to prevent the highly conductive layers fromblackening. Thus, reduction in machine-reading accuracy of the alignmentmarks 71, 73, 74, 76, 77 or the product information 78, 79 is preventedand the reliability of the product improves.

In the above-described first and second embodiments, there have beenshown and described examples in which the alignment marks for positionmatching are formed independently of the lead-out conductors 43, 48.However, the way of position matching is not limited to these examplesand may be conducted based upon partial pattern layout of the lead-outconductors 43, 48. That is, the lead-out conductors 43, 48 mayadditionally play the same role as that of the alignment marks. Aposition-matching method in this case is described below referring toFIG. 17.

In the step of cutting the touchscreen panel sensor film 70, and in thestep of attaching FPC or other components to a touchscreen panel sensorfilm sheet 72 obtained by sheet cutting, it is generally required todetect coordinates of at least two points on the touchscreen panelsensor film 70 or the touchscreen panel sensor film sheet 72. Thesecoordinates for position matching may be calculated based upon portionsof the lead-out conductors 43, 48 formed in the non-active area. Forexample, as denoted by dotted lines 81 a, 81 b in FIG. 17, corners ofthe pattern of the lead-out conductors 43, 48 may be used as thecoordinates for position matching. The corners of the pattern of thelead-out conductors 43, 48 are relatively easy to detect, since thecorners are where the pattern changes a direction where the patternextends.

Furthermore, while an example in which the corners of the pattern of thelead-out conductors 43, 48 are used as the coordinates for positionmatching has been shown and described, the way to obtain the coordinatesfor position matching is not limited to this example and may be basedupon portions having predetermined directionality, of the pattern of thelead-out conductors 43, 48. Of the lead-out conductors 43, 48 in FIG.17, the portions boxed with dotted lines 82 a, 82 b are those extendingin a first direction (a horizontal direction in FIG. 17). In contrast,of the lead-out conductors 43, 48, portions boxed with dotted lines 83a, 83 b are those extending in a second direction orthogonal to thefirst direction, that is, in a vertical direction in FIG. 17. In thiscase, in the lead-out conductors 43, 48, crossing points between theportions extending in the first direction and those extending in thesecond direction can be calculated by detecting the portions boxed withthe dotted lines 82 a, 82 b and those boxed with the dotted lines 83 a,83 b. Thus, coordinates of predetermined points on the touchscreen panelsensor film 70 or the touchscreen panel sensor film sheet 72 can becalculated and position matching to the FPC and other components can beconducted using the calculated coordinates.

Moreover, in the first and second embodiments, there has been shown anddescribed an example in which alignment marks or product informationincludes a two-layer film comprising the transparent electricallyconductive layers 52 a, 52 b and the covering electrically conductivelayers 54 a, 54 b arranged in that order on the base film 32. Inaddition, there has been shown and described an example in whichalignment marks or product information includes a three-layer filmcomprising the transparent electrically conductive layers 52 a, 52 b,the intermediate layers 61, 66, and the covering conductive layers 54 a,54 b arranged in that order on the base film 32. However, these examplesdo not limit the present invention and the alignment marks or theproduct information may be consisted of the transparent conductivelayers 52 a, 52 b provided on the base film 32. As set forth in thedescription of the first and second embodiments, the transparentconductive layers 52 a, 52 b (transparent electrical conductors 40, 45)are constructed to have a light-transmitting property with respect tovisible light. Therefore, if the alignment marks or the productinformation is consisted of the transparent conductive layers 52 a, 52b, the alignment marks or the product information will be detected usinglight other than visible light, this detection light being reflectibleor absorbable by the transparent conductive layers 52 a, 52 b. Forexample, the detection light will be ultraviolet radiation.

Third Embodiment

Next, a third embodiment of the present invention is described belowreferring to FIGS. 18A to 20. The third embodiment shown in FIGS. 18A to20 differs from the first and second embodiments only in that one pairof indexes are provided for evaluating the position accuracy of thepatterns on one side of the touchscreen panel sensor and on the otherside thereof, and all other configurational factors are substantiallythe same as those of the first and second embodiments. In the thirdembodiment of FIGS. 18A to 20, the same elements as used in the firstand second embodiments are each assigned the same reference number, andfurther detailed description of these elements is omitted herein.

A shape and layer structure of the paired index portions are firstdescribed below referring to FIGS. 18A and 18B. FIG. 18A is a top viewshowing a touchscreen panel sensor piece 75 used in the presentembodiment, and FIG. 18B is a sectional view of the touchscreen panelsensor piece 75.

As shown in FIG. 18A, one pair of indexes, 85, are provided on thetouchscreen panel sensor piece 75 according to the present embodiment.The index portion pair 85 includes a first index portion 90 formed inthe non-active area Aa2, on one surface of the touchscreen panel sensorpiece 75, and a second index portion 95 formed in the non-active areaAa2, on the other surface of the touchscreen panel sensor piece 75.

The index portion pair 85 is constructed so that one of the indexportions has a predetermined proximity relationship with respect to theother index portion. For example, the index portion pair 85 isconstructed for the first index portion 90 to have the predeterminedproximity relationship with respect to the second index portion 95. The“predetermined proximity relationship” here means that if a position ofthe second index portion 95 relative to that of the first index portion90 is shifted from design value, the first index portion 90 and thesecond index portion 95 have respective shapes and positions determinedso that a degree of the shift in at least one direction can be visuallyevaluated.

The shapes, positions, and layer structures of the first index portion90 and the second index portion 95 are next described in detail belowreferring to FIG. 18B. The first index portion 90 and second indexportion 95 shown in FIG. 18B assume that an error due to manufacture isabsent between the position of the pattern on one surface of thetouchscreen panel sensor piece 75 and the position of the pattern on theother surface thereof.

First, the layer structures of the first index portion 90 and the secondindex portion 95 are described below. As shown in FIG. 18B, the firstindex portion 90 and the second index portion 95, as with the alignmentmarks or product information in the first embodiment, respectivelyinclude a two-layer film comprising the transparent electricallyconductive layers 52 a, 52 b and the covering electrically conductivelayers 54 a, 54 b arranged in that order on the base film 32. However,the first index portion 90 and the second index portion 95, as with thealignment marks or product information in the second embodiment, mayrespectively include a three-layer film comprising the transparentelectrically conductive layers 52 a, 52 b, the intermediate layers 61,66, and the covering conductive layers 54 a, 54 b arranged in that orderon the base film 32.

As shown in FIGS. 18A and 18B, a region left by partially removing thefirst transparent conductive layer 52 a and the first coveringconductive layer 54 a is formed at the first index portion 90. Asdescribed herein, the base film 32 is formed from a material having alight-transmitting property. Light that has entered the above region ofthe first index portion 90, therefore, passes through the base film 32and reaches the other surface of the touchscreen panel sensor piece 75.The portion of the first index portion 90, constructed to make the lightreach the other surface of the touchscreen panel sensor piece 75, ishereinafter referred to as the transmitting portion 92.

The embodiment shown in FIG. 18B assumes that information associatedwith the light reflected by the covering conductive layers 54 a, 54 b(i.e., information on the light reflected from the covering conductivelayers 54 a, 54 b, or information indicating that the light is blockedby the covering conductive layers 54 a, 54 b) is used as a basis fordetecting or visually recognizing a pattern of the index portions 90,95. In the embodiment of FIG. 18B, therefore, a profile of the indexportions 90, 95 as detected is dictated by a profile of the coveringconductive layers 54 a, 54 b. Of the index portions 90, 95, portionsthat define the pattern detected or visually recognized are hereinaftertermed the working portions 91, 96. In FIG. 18B, the working portion 91of the first index portion 90 has an outer profile denoted by referencenumber 91 a, and the working portion 91 of the first index portion 90has an inner profile denoted by reference number 91 b. In addition, theworking portion 96 of the second index portion 95 has an outer profiledenoted by reference number 96 a, and the working portion 96 of thesecond index portion 95 has an inner profile denoted by reference number96 b. The transmitting portion 92 of the first index portion 90 isdefined as an inside portion of the inner profile 91 b.

The second index portion 95 is constructed so that when viewed from adirectional normal to the base film 32 (hereinafter, this direction isconveniently referred to as the normal-line direction), the second indexportion 95 is disposed at least partly at a position internal to theinner profile 91 b of the working portion 91 of the first index portion90, that is, inside the transmitting portion 92. For example as shown inFIG. 18B, given no error due to manufacture, the second index portion 95is constructed so that the inner profile 91 b of the working portion 91of the first index portion 90 and the outer profile 96 b of the workingportion 96 of the second index portion 95 substantially match eachother. In other words, the index portion pair 85 including the firstindex portion 90 and the second index portion 95 has a so-calledbox-in-box configuration in which one of the elements constituting thepair is placed inside a closed region that the other element defines.

Next, operational characteristics of the touchscreen panel sensor piece75 with the index portion pair 85 provided thereupon are described belowreferring to FIGS. 19(a), 19(b), and 19(c). A method of evaluating theposition accuracy of the pattern formed on one surface of thetouchscreen panel sensor piece 75, relative to the pattern formed on theother surface of the sensor piece 75, is first described below.

FIG. 19(a) is a top view showing a first index portion 90 and secondindex portion 95 obtained when an error due to manufacture is absent. Inthis case, as shown in FIG. 19(a), the transmitting portion 92 of thefirst index portion 90 and the working portion 96 of the second indexportion 95 substantially match each other. That is, when viewed from thenormal-line direction of the base film 32, the working portion 96 of thesecond index portion 95 is visually recognized over an entire regioninternal to the working portion 91 of the first index portion 90. Thus,it can be visually confirmed that the pattern on one surface of thetouchscreen panel sensor piece 75 is formed exactly as predesigned, withrespect to the pattern on the other surface of the touchscreen panelsensor piece 75.

Referring to FIG. 19(a), symbols w₁ and d₁ denote widths of thetransmitting portion 92 of the first index portion 90 and the workingportion 96 of the second index portion 95, in a first direction, andsymbols w₂ and d₂ denote widths of the transmitting portion 92 of thefirst index portion 90 and the working portion 96 of the second indexportion 95, in a second direction orthogonal to the first direction. Thewidths of the transmitting portion 92 of the first index portion 90 andthe working portion 96 of the second index portion 95 are each set to bean appropriate value according to a permissible manufacturing error. Forexample, if the permissible manufacturing error is 0.5 mm in both of thefirst and second directions, the widths w₁ and d₁ as well as the widthsw₂ and d₂ are both set to be 0.5 mm.

FIG. 19(b) is a top view showing a first index portion 90 and secondindex portion 95 obtained when the error due to manufacture is within apermissible range. Referring to FIG. 19(b), the manufacturing-associatederror in the position of the second index portion 95 relative to that ofthe first index portion 90 (i.e., a shift from the design data) isexpressed by arrow “s”. The arrow “s” here is a resultant vector ofarrow s₁ denoting a shift in the first direction, and arrow s₂ denotinga shift in the second direction.

In the example that FIG. 19(b) shows, when viewed from the normal-linedirection of the base film 32, part of the working portion 96 of thesecond index portion 95 is visually recognized internally to the firstindex portion 90. Thus, it can be visually confirmed that the shift inthe position of the second index portion 95 relative to that of thefirst index portion 90, or the shift from the design data, is smallerthan 0.5 mm in both of the first and second directions.

FIG. 19(c) is a top view showing a first index portion 90 and secondindex portion 95 obtained when the error due to manufacture is outsidethe permissible range. In the example that FIG. 19(c) shows, when viewedfrom the normal-line direction of the base film 32, no part of theworking portion 96 of the second index portion 95 is visually recognizedinternally to the first index portion 90. Thus, it can be visuallyconfirmed that the shift in the position of the second index portion 95relative to that of the first index portion 90, or the shift from thedesign data, is equal to or more than 0.5 mm in at least one directionof the first and second directions.

As is evident from the description of the first embodiment shown inFIGS. 5C to 5F, the pattern portions of the touchscreen panel sensorpiece 75 that substantially match in width between the transparentconductive layers 52 a, 52 b and the covering conductive layers 54 a, 54b are those obtained as a result of a first execution cycle of exposure,development, and etching steps S3 to S7. Evaluation results obtainedfrom the examples shown in FIG. 18B and FIGS. 19(a) to 19(c), therefore,represent relative position accuracy between the first exposure,development, and etching steps executed to generate the pattern on onesurface, and the first exposure, development, and etching steps executedto generate the pattern on the other surface.

In this way, in accordance with the present embodiment, the indexportion pair 85 constructed so that one index portion has thepredetermined proximity relationship with respect to the other indexportion is provided in the non-active area Aa2, on both surfaces of thetouchscreen panel sensor piece 75. The position accuracy of the patternon one surface with respect to the pattern on the other surface cantherefore be visually evaluated. This enables easy inspection fordetermining the propriety of shipping the touchscreen panel sensor piece75. In addition, at a shipping destination of the touchscreen panelsensor piece 75, a user who receives the product can readily/easilyevaluate or confirm the position accuracy of its patterns.

In the above embodiment, there has been shown and described an examplein which the widths of the transparent conductive layers 52 a, 52 b andcovering conductive layers 54 a, 54 b constituting the first indexportion 90 and the second index portion 95 are substantially inagreement. However, this example does not limit the present inventionand the widths of the transparent conductive layers 52 a, 52 b andcovering conductive layers 54 a, 54 b constituting the first indexportion 90 and the second index portion 95 do not need to agree. Anexample in which the widths of the transparent conductive layers 52 a,52 b and covering conductive layers 54 a, 54 b constituting the firstindex portion 90 and the second index portion 95 are not in agreement isdescribed below referring to FIGS. 20 and 21.

FIG. 20 is a sectional view showing one pair of index portions, 85, ofthe touchscreen panel sensor piece 75 according to an example ofmodification. As shown in FIG. 20, a first covering conductive layer 54a forming a first index portion 90 is constructed to have smaller widththan a first transparent conductive layer 52 a. Likewise, a secondcovering conductive layer 54 b forming a second index portion 95 isconstructed to have smaller width than a second transparent conductivelayer 52 b. In this case, regions on the index portions 90, 95 where thecovering conductive layers 54 a, 54 b are present are working portions91, 96.

The “smaller width” here means that the covering conductive layers 54 a,54 b of the index portions 90, 95 were formed in the second exposure,development, and etching steps. In other words, in the example of theindex portions 90, 95 that is shown in FIG. 20, the transparentconductive layers 52 a, 52 b have a shape defined in the first exposure,development, and etching steps, whereas the covering conductive layers54 a, 54 b have a shape defined in the second exposure, development, andetching steps. A region denoted by a double-dotted line in FIG. 20denotes a covering conductive layer 54 a′ or 54 b′ removed as a resultof the second exposure, development, and etching steps.

Next, operational characteristics of the touchscreen panel sensor piece75 with the index portion pair 85, shown in FIG. 20, provided thereuponare described below referring to FIG. 21.

FIG. 21 is a top view showing a first index portion 90 and second indexportion 95 obtained when an error due to manufacture is within apermissible range. In the example that FIG. 21 shows, width of atransmitting portion 92 of the first index portion 90 and width of aworking portion 96 of the second index portion 95, as in the examples ofFIGS. 19(a) to 19(c), are both set to be 0.5 mm, for example, in bothfirst and second directions. In the example that FIG. 21 shows, whenviewed from the normal-line direction of the base film 32, part of theworking portion 96 of the second index portion 95 is visually recognizedinternally to the transmitting portion 92 of the first index portion 90.Thus, it can be visually confirmed that a shift in a position of thesecond index portion 95 relative to that of the first index portion 90,or a shift from design data, is smaller than 0.5 mm in both of the firstand second directions.

As described above, in the example that FIGS. 20 and 21 show, the shapeof the covering conductive layers 54 a, 54 b constituting the workingportions 91, 96 is defined in the second exposure, development, andetching steps. Evaluation results obtained from the example shown inFIGS. 20 and 21, therefore, represent the relative position accuracyobtained between the second exposure, development, and etching stepsexecuted for generating the pattern on one surface, and the secondexposure, development, and etching steps executed for generating thepattern on the other surface.

In the embodiment shown in FIGS. 18B to 21, there have been shown anddescribed examples of pattern detection of the index portions 90, 95,based on the pattern of the covering conductive layers 54 a, 54 b.Pattern detection, however, is not limited to these examples and patterndetection of the index portions 90, 95 may be conducted based on thepattern of the transparent conductive layers 52 a, 52 b. That is, theworking portions 91, 96 of the index portions 90, 95 may be constitutedby the transparent conductive layers 52 a, 52 b. In this case, as in acase of the alignment marks or product information being consisted ofthe transparent conductive layers 52 a, 52 b, the alignment marks or theproduct information will be detected using light other than visiblelight, this detection light being reflectible or absorbable by thetransparent conductive layers 52 a, 52 b. For example, the detectionlight will be ultraviolet radiation.

In the embodiment shown in FIGS. 20 and 21, there has been shown anddescribed an example of evaluating relative position accuracy betweenthe patterns formed on one surface of the touchscreen panel sensor piece75 and the other surface thereof, in the first exposure, development,and etching steps. In addition, there has been shown and described anexample of evaluating relative position accuracy between the patternsformed on one surface of the touchscreen panel sensor piece 75 and theother surface thereof, in the second exposure, development, and etchingsteps. These examples, however, do not limit the present invention andthe first index portion 90 or second index portion 95 shown in FIGS. 20and 21 may be used to evaluate relative position accuracy between thepatterns formed in the first exposure, development, and etching steps,and the patterns formed in the second exposure, development, and etchingsteps. Examples of such evaluation are described below referring toFIGS. 22(a) and 22(b).

FIG. 22(a) is a top view showing a first index portion 90 obtained whenthere is no relative manufacturing-associated error between the firstand second exposure, development, and etching steps. FIG. 22(b) is a topview showing a first index portion 90 obtained when there is a relativemanufacturing-associated error between the first and second exposure,development, and etching steps. In the first index portions 90 of FIGS.22(a), 22(b), as in the first index portion 90 of FIGS. 20 and 21, thewidth of the first covering conductive layer 54 a is smaller than thatof the first transparent conductive layer 52 a. In this case, an outerprofile denoted by reference symbol 91 a can be detected from a shape ofthe first covering conductive layer 54 a. If ultraviolet radiation orthe like is used, an outer profile denoted by reference symbol 91 a′ canalso be detected from a shape of the first transparent conductive layer52 a. In addition, distances u₁ and u₂ between the outer profiles 91 aand 91 a′ detected in both a first direction and a second direction canbe calculated from the outer profiles 91 a, 91 a′. Furthermore, relativeposition accuracy between the patterns in the first exposure,development, and etching steps, and the patterns in the second exposure,development, and etching steps, can be evaluated by calculating shiftsfrom the distances u₁, u₂ from respective design data.

In the embodiment shown in FIGS. 18A to 22, there have been shown anddescribed examples of constructing the index portions 90, 95 so thatgiven no error due to manufacture, the inner profile 91 b of the workingportion 91 of the first index portion 90 and the outer profile 96 a ofthe working portion 96 of the second index portion 95 substantiallymatch. However, further detailed shapes of the index portions 90, 95 arenot limited and index portions 90, 95 of varying shapes can be used asappropriate. For example, as shown in FIG. 23(a), the index portions 90,95 may be constructed so that a predetermined gap exists between theworking portion 91 of the first index portion 90 and the working portion96 of the second index portion 95. Additionally, shapes of the workingportions 91, 96 of the index portions 90, 95 are not limited to arectangle and for example, as shown in FIG. 23(b), at least one of theworking portions 91, 96 of the index portions 90, 95 can be of acircular shape. Alternatively, as shown in FIG. 23(c), both of theworking portions 91, 96 of the index portions 90, 95 can be of acircular shape. In this case, not only can it be visually confirmed thatthe shift in the first direction (i.e., a shift corresponding to arrows₁) and the departure in the second direction (i.e., a shiftcorresponding to arrow s₂) are smaller than the predetermined values,but can it also be visually confirmed that a total of the shifts (i.e.,a quantity corresponding to arrow “s”) is smaller than a predeterminedvalue. In the example that FIG. 23(c) shows, the inner profile of theworking portion 91 of the first index portion 90 and the outer profileof the working portion 96 of the second index portion 95 can eithermatch or mismatch.

Furthermore, in the embodiment shown in FIGS. 18A to 22, there has beenshown and described an example in which the transmitting portion 92defined by the inner profile 91 b of the working portion 91 of the firstindex portion 90 is a completely closed region. However, this exampledoes not limit the present invention and provided that a change in aposition of the working portion 96 of the second index portion 95relative to the working portion 91 of the first index portion 90 can bevisually confirmed, the transmitting portion 92 of the first indexportion 90 does not need to be a completely closed region. For exampleas shown in FIG. 23(d), the transmitting portion 92 may be defined by aworking portion 91 partially or partly segmented in the first indexportion 90. Similarly, the second index portion 95 may have a partiallyor partly segmented working portion 96.

Modifications of the Third Embodiment

Next, modifications of the third embodiment of the present inventionwill be described referring to FIGS. 24 and 25.

In the third embodiment of FIGS. 18A to 23, there has been shown anddescribed an example of constructing one pair of indexes, 85, in such aform that the position accuracy of patterns in both a first directionand a second direction can be evaluated. To be more specific, an exampleof one pair of index portions, 85, having the so-called box-in-boxconfiguration has been shown and described. This example, however, doesnot limit the present invention and the index portion pair 85 only needsto be constructed so as to enable the position accuracy of patterns inat least one direction to be evaluated. Examples of index portion pair85 constructed so that the position accuracy of a pattern on one surfacerelative to a pattern on the other surface can be evaluated in onedirection are described below with reference being made to FIGS. 24 and25.

FIG. 24 is a top view of one pair of index portions, 85, in amodification, showing the index portion pair 85 obtained in absence ofan error due to manufacture. As shown in FIG. 24, of the index portionpair 85, a first index portion 90 provided on one surface of thetouchscreen panel sensor piece 75 includes a plurality of first unitindex portions 90 a arranged at a pitch p₁ in a first direction (ahorizontal direction in FIG. 24). Likewise, of the index portion pair85, a second index portion 95 provided on the other surface of thetouchscreen panel sensor piece 75 includes a plurality of second unitindex portions 95 a arranged at a pitch p₂ in the first direction.

The first unit index portions 90 a and the second unit index portions 95a are each constructed to have substantially the same width in the firstdirection. The first unit index portions 90 a are also each constructedto face one of the second unit index portions 95 a in a second directionorthogonal to the first direction. In addition, the arrangement pitch p₁of the first unit index portions 90 a and the arrangement pitch p₂ ofthe second unit index portions 95 a are set to differ from each other.In the first index portion 90 and second index portion 95 having thisconfiguration, shifts in position due to a manufacturing error can beeasily evaluated by visually confirming what number first unit indexportion 90 a of the plurality of first unit index portions 90 a is inalignment with what number second unit index portion 95 a of theplurality of second unit index portions 95 a. The index portions 90, 95are thus constructed as scale marks of a so-called vernier type.

Consider an example in which the arrangement pitch p₁ of the first unitindex portions 90 a is 0.9 mm and the arrangement pitch p₂ of the secondunit index portions 95 a is 0.8 mm. In this example, if there is nomanufacturing error, the first unit index portion 90 a and second unitindex portion 95 a positioned in the middle of the first unit indexportions 90 a and second unit index portions 95 a are in alignment asshown in FIG. 24. The wording “in alignment” here means that coordinatesof facing ends of the unit index portions 90 a, 95 a positioned in themiddle are the same in the direction that the unit index portions 90 a,95 a are arranged, that is, the first direction. In another example, ifa manufacturing error causes the position of the pattern on one surfacerelative to the pattern on the other surface to shift through 0.3 mmleftward in one direction, the first unit index portion 90 a taking upthe second position from the left of the plurality of first unit indexportions 90 a is, as shown in FIG. 25, in alignment with the second unitindex portion 95 a taking up the second position from the left of theplurality of second unit index portions 95 a. In other words, the secondposition from the left of the plurality of first or second unit indexportions means the third-left position from the middle unit indexportion 90 a, 95 a. In accordance with the examples shown in FIGS. 24and 25, the amount of shift in the position of the pattern on onesurface with respect to the pattern on the other surface, in onedirection, can be easily evaluated by visually confirming what numberfirst unit index portion 90 a is in alignment with what number secondunit index portion 95 a.

In addition to one index portion pair 85 including index portions 90, 95with a plurality of unit index portions 90 a, 95 a arranged in a firstdirection, another index portion pair 85 including index portions 90, 95with a plurality of unit index portions 90 a, 95 a arranged in a seconddirection orthogonal to the first direction may be provided in thepresent modification, as shown in FIG. 26. This makes it easy toevaluate the amount of shift in the position of the pattern on onesurface with respect to the pattern on the other surface, in onedirection as well as in the other direction. Additionally, the shape ofthe unit index portions 90 a, 95 a positioned in the middle of theplurality of unit index portions 90 a, 95 a in the present modificationmay slightly differ from that of the unit index portions 90 a, 95 apresent at other positions. For example as shown in FIG. 26, the unitindex portions 90 a, 95 a positioned in the middle of the plurality ofunit index portions 90 a, 95 a may be longer than the unit indexportions 90 a, 95 a present at other positions, in the directionorthogonal to that in which the other unit index portions 90 a, 95 a arearranged. This difference in shape enables easy recognition of the unitindex portions 90 a, 95 a positioned in the middle, and hence enableseasy evaluation of the amount of shift in the position of the pattern onone surface with respect to the pattern on the other surface.Furthermore, as shown in FIG. 26, scale marks 90 b may be added as anindex for evaluating the amount of shift in the position of the patternon one surface with respect to the pattern on the other surface. Scalemarks “0”, “+0.4”, “−0.4” in the example of FIG. 26 denote that when theunit index portions 90 a, 95 a with the scale marks assigned thereto arein alignment, the amount of shift in the position of the pattern on onesurface with respect to the pattern on the other surface is 0, +0.4, or−0.4.

Furthermore, the present modification does not limit detailed layerconfigurations of the first unit index portions 90 a and the secondindex portions 95 a, and may employ a variety of other layerconfigurations as appropriate.

For example, as with the embodiment shown in FIG. 18B, the first unitindex portions 90 a and the second index portions 95 a can includecovering conductive layers 54 a, 54 b that are substantially of the samewidth as that of the transparent conductive layers 52 a, 52 b.Evaluation results obtained in this case will indicate the relativeposition accuracy between the first exposure, development, and etchingsteps executed for generating the pattern on one surface, and the firstexposure, development, and etching steps executed for generating thepattern on the other surface.

Furthermore, as with the embodiment shown in FIG. 20, the first unitindex portions 90 a and the second index portions 95 a can includecovering conductive layers 54 a, 54 b that are smaller than thetransparent conductive layers 52 a, 52 b in width. Evaluation resultsobtained in this case will reflect the relative position accuracyobtained between the second exposure, development, and etching stepsexecuted for generating the pattern on one surface, and the secondexposure, development, and etching steps executed for generating thepattern on the other surface.

In the present modification, there has been shown and described anexample of each index portion 90, 95 including the plurality of unitindex portions 90 a, 95 a, respectively, arranged at predeterminedpitches in one direction. This example, however, does not limit thepresent invention and provided that the position accuracy of patterns inat least one direction can be evaluated by observing the position of thefirst index portion 90 relative to the second index portion 95, eachindex portion 90, 95 can be constructed into various forms. For example,the first index portion 90 may extend linearly in a second directionorthogonal to a first direction, and the second index portion 95 may bedisposed in point-like form in proximity to the first index portion 90.In this case, the amount of shift in the position of the pattern on onesurface with respect to the pattern on the other surface can be easilyevaluated if a distance from the first index portion 90 to the secondindex portion 95 is visually confirmed.

In the third embodiment and its modifications, there have been shown anddescribed examples of forming one pair of index portions, 85, in thenon-active areas Aa2 of each touchscreen panel sensor piece 75. However,these examples are not limitative and the index portion pair 85 may, asshown in FIG. 27, be provided in the non-active area Aa2 (outer-edgeneighborhood) of a touchscreen panel sensor film sheet 72 including aplurality of unit patterns formed thereupon by step-and-repeatimposition.

While several modifications of the above embodiments have beendescribed, obviously the plurality of modifications or a plurality ofother modifications can instead be applied in combination.

DESCRIPTION OF REFERENCE NUMERALS

-   10: Input/output device-   15: Display device-   20: Touchscreen panel device-   30: Touchscreen panel sensor-   32: Base film-   32 a: One surface of the base film-   32 b: The other surface of the base film-   33: Film body-   34: Function film (index-matching film)-   34 a: High-refractive-index film-   34 b: Low-refractive-index film-   35: Function film (low-refractive-index film)-   37 a: Sensor electrode-   37 b: Lead-out line-   40: First transparent electrical conductor-   41: First sensor portion-   41 a: Linear portion-   41 b: Bulged portion-   42: First terminal portion-   43: First electrical lead-out conductor-   45: Second transparent electrical conductor-   46: Second sensor portion-   46 a: Linear portion-   46 b: Bulged portion-   47: second terminal portion-   48: Second electrical lead-out conductor-   50: Laminate (blanks)-   52 a: First transparent electrically conductive layer-   52 b: Second transparent electrically conductive layer-   54 a: First covering electrically conductive layer (first    light-shielding layer)-   54 b: Second covering electrically conductive layer (second    light-shielding layer)-   56 a: First photosensitive layer-   56 b: Second photosensitive layer-   56 c: Third photosensitive layer (another photosensitive layer)-   56 d: Fourth photosensitive layer (another photosensitive layer)-   58 a: First mask (first photomask)-   58 b: Second mask (second photomask)-   58 c: Third mask (third photomask)-   58 d: Fourth mask (fourth photomask)-   61: First intermediate layer-   62: First protective layer-   63: First covering conductive layer-   66: Second intermediate layer-   67: Second protective layer-   68: Second covering conductive layer-   70: Touchscreen panel sensor film formed on a web-   71: Alignment mark for sheet cutting a predetermined number of sets    of unit patterns formed by step-and-repeat imposition-   72: Touchscreen panel film composed of a predetermined number of    sets of unit patterns formed by step-and-repeat imposition-   73: Alignment mark for individual-piece cutting or creating precut    individual pieces-   74: Alignment mark for individual-piece cutting or creating precut    individual pieces-   75: Touchscreen panel sensor piece-   76: Alignment mark for position matching to the touchscreen panel    device-   77: Alignment mark for FPC attaching-   78: Product information-   79: Bar code product information-   85: One pair of indexes-   90: First index portion-   90 a: First unit index portion-   91: Working portion-   91 a: Outer profile-   91 b: Inner profile-   92: Transmitting portion-   95: Second index portion-   95 a: Second unit index portion-   96: Working portion-   96 a: Outer profile-   Aa1: Active area-   Aa2: Non-active area

The invention claimed is:
 1. A touchscreen panel sensor film,comprising: a transparent base film; and a transparent electricalconductor pattern provided on at least one surface of the base film;wherein alignment marks or product information is formed on a non-activearea of the sensor film.
 2. The touchscreen panel sensor film accordingto claim 1, wherein the alignment marks or the product informationincludes either a two-layer film or a three-layer film; the two-layerfilm comprising a transparent electrically conductive layer and acovering electrically conductive layer arranged in that order on thebase film, and the three-layer film comprising a transparentelectrically conductive layer, an intermediate layer, and a coveringelectrically conductive layer arranged in that order on the base film.3. The touchscreen panel sensor film according to claim 1, wherein thealignment marks or the product information includes either a two-layerfilm or a three-layer film; the two-layer film comprising a transparentelectrically conductive layer and a covering electrically conductivelayer arranged in that order on the base film, and the three-layer filmcomprising a transparent electrically conductive layer, an intermediatelayer, and a covering electrically conductive layer arranged in thatorder on the base film; the alignment marks or the product informationbeing formed on both surfaces of the base film.
 4. The touchscreen panelsensor film according to claim 1, wherein unit patterns eachconstituting individual products as a unit are formed by step-and-repeatimposition.
 5. The touchscreen panel sensor film according to claim 4,wherein the alignment marks or the product information is formed foreach of the unit patterns.
 6. The touchscreen panel sensor filmaccording to claim 4, wherein the alignment marks or the productinformation is formed for each of a predetermined number of sets of unitpatterns formed by step-and-repeat imposition.
 7. The touchscreen panelsensor film according to claim 1, wherein the alignment marks are usedfor purposes of sheet cutting, individual-piece cutting,individual-piece punching-through, FPC attaching, or position matchingto a display panel.
 8. The touchscreen panel sensor film according toclaim 7, wherein the alignment marks are formed for each of thepurposes.
 9. The touchscreen panel sensor film according to claim 7,wherein at least one of the alignment marks is formed so as to fulfillat least two of the purposes.
 10. The touchscreen panel sensor filmaccording to claim 7, wherein the alignment marks includes an alignmentmark formed so as to fulfill only one of the purposes, and an alignmentmark formed so as to fulfill at least two of the purposes.
 11. Thetouchscreen panel sensor film according to claim 1, wherein, the productinformation includes at least one kind of information among product nameinformation, lot number information, manufacturing date information, andproduct grade information.
 12. The touchscreen panel sensor filmaccording to claim 11, wherein the product information is formed in abar code format.
 13. A method for manufacturing a touchscreen panelsensor film including a transparent base film, a transparent electricalconductor pattern provided on at least one surface of the base film,with a portion of the conductor pattern being linearly formed on thesurface of the base film, and alignment marks or/and product informationformed in a non-active area, the manufacturing method comprising thesteps of: forming a photosensitive layer having a photosensitiveproperty, on a surface of a laminate including the base film, atransparent electrically conductive layer provided on at least onesurface of the base film, and a covering electrically conductive layerprovided on the transparent electrically conductive layer, thephotosensitive layer being formed upon the covering electricallyconductive layer; exposing the photosensitive layer to light; patterninga sensor portion, a terminal portion, electrical lead-out lines, and thealignment marks or/and the product information by developing thephotosensitive layer; patterning the covering electrically conductivelayer by etching the covering electrically conductive layer, using thepatterned photosensitive layer as a mask; patterning the transparentelectrically conductive layer by etching the transparent electricallyconductive layer using the patterned photosensitive layer and thepatterned covering electrically conductive layer as masks; removing thepatterned photosensitive layer; forming another photosensitive layer onthe patterned covering electrically conductive layer; exposing the otherphotosensitive layer to light; patterning the other photosensitive layerby means of development; removing a portion of the patterned coveringelectrically conductive layer by etching the patterned coveringelectrically conductive layer, using the patterned other photosensitivelayer as a mask, thereby forming the sensor portion; and removing thepatterned other photosensitive layer.
 14. A method for manufacturing atouchscreen panel sensor film including a transparent base film, atransparent electrical conductor pattern provided on at least onesurface of the base film, with a portion of the conductor pattern beinglinearly formed on the surface of the base film, and alignment marksor/and product information formed in a non-active area, themanufacturing method comprising the steps of: forming a photosensitivelayer having a photosensitive property, on a surface of a laminateincluding the base film, a transparent electrically conductive layerprovided on at least one surface of the base film, and a coveringelectrically conductive layer provided on the transparent electricallyconductive layer, the photosensitive layer being formed upon thecovering electrically conductive layer; exposing the photosensitivelayer to light; developing the photosensitive layer, thereby patterninga sensor portion, a terminal portion, electrical lead-out lines, and thealignment marks or/and the product information; patterning the coveringelectrically conductive layer and the transparent electricallyconductive layer by etching one surface of the laminate down to thetransparent electrically conductive layer, using the patternedphotosensitive layer as a mask; removing the patterned photosensitivelayer; forming another photosensitive layer on the patterned coveringelectrically conductive layer; exposing the other photosensitive layerto light; patterning the other photosensitive layer by means ofdevelopment; removing a portion of the patterned covering electricallyconductive layer by etching the patterned covering electricallyconductive layer, using the patterned other photosensitive layer as amask, thereby forming the sensor portion; and removing the patternedother photosensitive layer.
 15. A touchscreen panel sensor film,comprising: a transparent base film; transparent electrical conductorpatterns provided on both surfaces of the base film; and one pair ofindex portions formed in non-active areas on both surfaces of the sensorfilm, the index portion pair being constructed so that one of the pairedindex portions has a predetermined proximity relationship with respectto the other of the paired index portions.
 16. The touchscreen panelsensor film according to claim 15, wherein the index portion pairincludes either a two-layer film or a three-layer film; the two-layerfilm comprising a transparent electrically conductive layer and acovering electrically conductive layer arranged in that order on thebase film, and the three-layer film comprising a transparentelectrically conductive layer, an intermediate layer, and a coveringelectrically conductive layer arranged in that order on the base film.17. The touchscreen panel sensor film according to claim 15, wherein:one of the paired index portions includes an inner profile; and theother of the paired index portions is at least partly disposedinternally to the inner profile.
 18. The touchscreen panel sensor filmaccording to claim 15, wherein: the paired index portions each include aplurality of unit index portions arranged at predetermined pitches inone direction; and the pitch of the unit index portions of one of thepaired index portions is different from that of the unit index portionsof the other of the paired index portions.